Current Position Head of Laboratory of E-beam and Optical Lithography, Valiev Institute of Physics and Technology of Russian Academy of Sciences
Contact Information
E-mail rogozhin@ftian.ru
Areas of Research
Current research topics are e-beam and optical lithography, materials and technologies for micro- and nanoelectronics applications, measurements of material and device parameters.
Academic Career and Positions
12/2022-current Head of Laboratory of E-beam and Optical Lithography, Valiev IPT RAS, Moscow, Russia
09/2022-current Docent at Moscow Power Engineering Institute (MPEI), Moscow, Russia
01/2015-current Docent at Moscow Institute of Physics and Technology (MIPT), Dolgoprudny, Moscow Region, Russia
04/2013 – current Senior Researcher at the Lab. MSSD, Valiev IPT RAS, Moscow, Russia
04/2010 – 04/2013 Research associate at the Lab of Microstructuring and Submicron Devices (MSSD) of the Institute of Physics and Technology (IPT) of Russian Academy of Sciences, Moscow, Russia
12/2009 PhD in Physics and Mathematics, Institute of Physics and Technology of Russian Academy of Sciences (IPT RAS), Moscow, Russia
09/2006 – 12/2009 PhD student in the Institute of Physics and Technology of Russian Academy of Sciences (IPT RAS), Moscow, Russia
06/2006 Graduated from Moscow Institute of Physics and Technology (MIPT), Dolgoprudny, Moscow Region, Russia, MSc in Physics and Mathematics