{"id":839,"date":"2019-12-06T09:22:30","date_gmt":"2019-12-06T09:22:30","guid":{"rendered":"https:\/\/normoprot.h1n.ru\/?p=839"},"modified":"2022-02-18T14:19:32","modified_gmt":"2022-02-18T14:19:32","slug":"razvitie-tehnologij-plazmenno-immersionnoj-ionnoj-implantacii","status":"publish","type":"post","link":"https:\/\/ftian.ru\/en\/razvitie-tehnologij-plazmenno-immersionnoj-ionnoj-implantacii\/","title":{"rendered":"\u0420\u0430\u0437\u0432\u0438\u0442\u0438\u0435 \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0439 \u043f\u043b\u0430\u0437\u043c\u0435\u043d\u043d\u043e-\u0438\u043c\u043c\u0435\u0440\u0441\u0438\u043e\u043d\u043d\u043e\u0439 \u0438\u043e\u043d\u043d\u043e\u0439 \u0438\u043c\u043f\u043b\u0430\u043d\u0442\u0430\u0446\u0438\u0438"},"content":{"rendered":"<p style=\"text-align: justify;\">\u0412\u043f\u0435\u0440\u0432\u044b\u0435 \u0432 \u0420\u043e\u0441\u0441\u0438\u0438 \u0440\u0430\u0437\u0440\u0430\u0431\u043e\u0442\u0430\u043d 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\u043e\u0431\u043b\u0430\u0434\u0430\u044e\u0449\u0438\u0439 \u0443\u043d\u0438\u043a\u0430\u043b\u044c\u043d\u044b\u043c\u0438 \u0432\u043e\u0437\u043c\u043e\u0436\u043d\u043e\u0441\u0442\u044f\u043c\u0438 \u0438\u043e\u043d\u043d\u043e\u0433\u043e 3D-\u043b\u0435\u0433\u0438\u0440\u043e\u0432\u0430\u043d\u0438\u044f, \u043d\u0430\u043f\u0440\u0438\u043c\u0435\u0440, \u0441\u0442\u0435\u043d\u043e\u043a \u0442\u0440\u0435\u043d\u0447\u0435\u0439 \u0432 \u0441\u0442\u0440\u0443\u043a\u0442\u0443\u0440\u0430\u0445 DRAM, \u043f\u043b\u0430\u0432\u043d\u0438\u043a\u043e\u0432\u044b\u0445 \u0441\u0442\u0440\u0443\u043a\u0442\u0443\u0440 \u043f\u0435\u0440\u0441\u043f\u0435\u043a\u0442\u0438\u0432\u043d\u044b\u0445 \u043c\u043d\u043e\u0433\u043e\u0437\u0430\u0442\u0432\u043e\u0440\u043d\u044b\u0445 \u043d\u0430\u043d\u043e\u0442\u0440\u0430\u043d\u0437\u0438\u0441\u0442\u043e\u0440\u043e\u0432.<\/p>\n<p>&nbsp;<\/p>\n<p><strong><a href=\"http:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/razvitie_tehnologii_plazmeno8543544.jpg\"><img loading=\"lazy\" decoding=\"async\" class=\"alignright wp-image-840\" src=\"http:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/razvitie_tehnologii_plazmeno8543544-300x291.jpg\" alt=\"\u0420\u0430\u0437\u0432\u0438\u0442\u0438\u0435 \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0439 \u043f\u043b\u0430\u0437\u043c\u0435\u043d\u043d\u043e-\u0438\u043c\u043c\u0435\u0440\u0441\u0438\u043e\u043d\u043d\u043e\u0439 \u0438\u043e\u043d\u043d\u043e\u0439 \u0438\u043c\u043f\u043b\u0430\u043d\u0442\u0430\u0446\u0438\u0438\" width=\"355\" height=\"344\" srcset=\"https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/razvitie_tehnologii_plazmeno8543544-300x291.jpg 300w, https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/razvitie_tehnologii_plazmeno8543544-1024x992.jpg 1024w, https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/razvitie_tehnologii_plazmeno8543544-768x744.jpg 768w, https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/razvitie_tehnologii_plazmeno8543544-465x451.jpg 465w, https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/razvitie_tehnologii_plazmeno8543544-516x500.jpg 516w, https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/razvitie_tehnologii_plazmeno8543544.jpg 1166w\" sizes=\"auto, (max-width: 355px) 100vw, 355px\" \/><\/a>\u041e\u0441\u043d\u043e\u0432\u043d\u044b\u0435 \u0445\u0430\u0440\u0430\u043a\u0442\u0435\u0440\u0438\u0441\u0442\u0438\u043a\u0438<\/strong><\/p>\n<ul>\n<li>\u0414\u0438\u0430\u043c\u0435\u0442\u0440 \u043e\u0431\u0440\u0430\u0431\u0430\u0442\u044b\u0432\u0430\u0435\u043c\u043e\u0439 \u043f\u043b\u0430\u0441\u0442\u0438\u043d\u044b \u2013 \u0434\u043e 150 \u043c\u043c<\/li>\n<li>\u0420\u0435\u0436\u0438\u043c \u0438\u043c\u043f\u043b\u0430\u043d\u0442\u0430\u0446\u0438\u0438 \u2013 \u0438\u043c\u043c\u0435\u0440\u0441\u0438\u043e\u043d\u043d\u044b\u0439, \u0438\u043c\u043f\u0443\u043b\u044c\u0441\u043d\u043e \u043f\u0435\u0440\u0438\u043e\u0434\u0438\u0447\u0435\u0441\u043a\u0438\u0439<\/li>\n<li>\u0414\u0438\u0430\u043f\u0430\u0437\u043e\u043d \u044d\u043d\u0435\u0440\u0433\u0438\u0438 \u0438\u043e\u043d\u043e\u0432 \u2013 0.1 \u2013 5 \u043a\u042d\u0432<\/li>\n<li>\u0414\u0438\u0430\u043f\u0430\u0437\u043e\u043d \u0434\u043e\u0437 \u043b\u0435\u0433\u0438\u0440\u043e\u0432\u0430\u043d\u0438\u044f \u2013 5\u044510<sup>14<\/sup> \u2013 5\u044510<sup>17<\/sup> \u0441\u043c<sup>-2<\/sup><\/li>\n<li>\u0421\u043a\u043e\u0440\u043e\u0441\u0442\u044c \u043d\u0430\u0431\u043e\u0440\u0430 \u0434\u043e\u0437\u044b \u201310<sup>14<\/sup> \u2013 10<sup>15<\/sup> \u0441\u043c<sup>-2<\/sup> \u0441<sup>-1<\/sup><\/li>\n<\/ul>\n<p><strong>\u0423\u043d\u0438\u043a\u0430\u043b\u044c\u043d\u044b\u0435 \u0432\u043e\u0437\u043c\u043e\u0436\u043d\u043e\u0441\u0442\u0438 \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0438<\/strong><\/p>\n<ul>\n<li style=\"text-align: justify;\">\u0411\u043e\u043b\u044c\u0448\u043e\u0439 \u0444\u043b\u044e\u0435\u043d\u0441 \u0438\u043e\u043d\u043e\u0432 \u043f\u0440\u0438 \u043d\u0438\u0437\u043a\u0438\u0445 \u044d\u043d\u0435\u0440\u0433\u0438\u044f\u0445<\/li>\n<li style=\"text-align: justify;\">\u0411\u043e\u043b\u044c\u0448\u0430\u044f \u0441\u043a\u043e\u0440\u043e\u0441\u0442\u044c \u043d\u0430\u0431\u043e\u0440\u0430 \u0434\u043e\u0437\u044b<\/li>\n<li style=\"text-align: justify;\">\u0412\u0440\u0435\u043c\u044f \u0438\u043c\u043f\u043b\u0430\u043d\u0442\u0430\u0446\u0438\u0438 \u043d\u0435 \u0437\u0430\u0432\u0438\u0441\u0438\u0442 \u043e\u0442 \u043f\u043b\u043e\u0449\u0430\u0434\u0438 \u043f\u043b\u0430\u0441\u0442\u0438\u043d\u044b<\/li>\n<li style=\"text-align: justify;\">\u041f\u0440\u0435\u043a\u0440\u0430\u0441\u043d\u044b\u0435 \u0432\u043e\u0437\u043c\u043e\u0436\u043d\u043e\u0441\u0442\u0438 \u0434\u043b\u044f 3D \u043b\u0435\u0433\u0438\u0440\u043e\u0432\u0430\u043d\u0438\u044f \u043d\u0435\u043f\u043b\u0430\u043d\u0430\u0440\u043d\u044b\u0445 \u0441\u0442\u0440\u0443\u043a\u0442\u0443\u0440<\/li>\n<li style=\"text-align: justify;\">\u041b\u0435\u0433\u043a\u043e \u0440\u0435\u0430\u043b\u0438\u0437\u0443\u0435\u043c\u0430\u044f \u043a\u043e-\u0438\u043c\u043f\u043b\u0430\u043d\u0442\u0430\u0446\u0438\u044f \u0440\u0430\u0437\u043b\u0438\u0447\u043d\u044b\u0445 \u0438\u043e\u043d\u043e\u0432, \u043f\u043e\u0441\u043b\u0435\u0434\u043e\u0432\u0430\u0442\u0435\u043b\u044c\u043d\u044b\u0435 \u043f\u0440\u043e\u0446\u0435\u0441\u0441\u044b \u0438\u043c\u043f\u043b\u0430\u043d\u0442\u0430\u0446\u0438\u0438 \u0432 \u043e\u0434\u043d\u043e\u0439 \u043a\u0430\u043c\u0435\u0440\u0435<\/li>\n<li style=\"text-align: justify;\">\u0414\u0438\u0430\u043f\u0430\u0437\u043e\u043d \u0434\u043e\u0437 \u043b\u0435\u0433\u0438\u0440\u043e\u0432\u0430\u043d\u0438\u044f \u043f\u0440\u043e\u0441\u0442\u0438\u0440\u0430\u0435\u0442\u0441\u044f \u0432\u043f\u043b\u043e\u0442\u044c \u0434\u043e \u0443\u0440\u043e\u0432\u043d\u0435\u0439 \u043e\u0431\u0440\u0430\u0437\u043e\u0432\u0430\u043d\u0438\u044f \u043d\u043e\u0432\u044b\u0445 \u0444\u0430\u0437, \u0432\u043e\u0437\u043c\u043e\u0436\u043d\u043e \u0441\u043e\u0437\u0434\u0430\u043d\u0438\u0435 \u0441\u0442\u0440\u0443\u043a\u0442\u0443\u0440 \u0438\u043e\u043d\u043d\u044b\u043c \u0441\u0438\u043d\u0442\u0435\u0437\u043e\u043c.<\/li>\n<\/ul>\n<hr>\n<p><em>\u0410.\u0410. \u041e\u0440\u043b\u0438\u043a\u043e\u0432\u0441\u043a\u0438\u0439, \u041a.\u0412. \u0420\u0443\u0434\u0435\u043d\u043a\u043e, \u0421.\u041d. \u0410\u0432\u0435\u0440\u043a\u0438\u043d. \u041f\u0440\u0435\u0446\u0438\u0437\u0438\u043e\u043d\u043d\u044b\u0435 \u043f\u043b\u0430\u0437\u043c\u043e\u0445\u0438\u043c\u0438\u0447\u0435\u0441\u043a\u0438\u0435 \u043f\u0440\u043e\u0446\u0435\u0441\u0441\u044b \u043c\u0438\u043a\u0440\u043e\u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u0438\u043a\u0438 \u043d\u0430 \u0431\u0430\u0437\u0435 \u0441\u0435\u0440\u0438\u0438 \u043f\u0438\u043b\u043e\u0442\u043d\u044b\u0445 \u0443\u0441\u0442\u0430\u043d\u043e\u0432\u043e\u043a \u0441 \u043c\u0430\u0441\u0448\u0442\u0430\u0431\u0438\u0440\u0443\u0435\u043c\u044b\u043c<\/em><em>ICP-\u0438\u0441\u0442\u043e\u0447\u043d\u0438\u043a\u043e\u043c \u043f\u043b\u0430\u0437\u043c\u044b.\/\/ \u0425\u0438\u043c\u0438\u044f \u0432\u044b\u0441\u043e\u043a\u0438\u0445 \u044d\u043d\u0435\u0440\u0433\u0438\u0439, \u0442.40, \u2116 3, \u0441. 220 &#8211; 232 (2006).<\/em><\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u0412\u043f\u0435\u0440\u0432\u044b\u0435 \u0432 \u0420\u043e\u0441\u0441\u0438\u0438 \u0440\u0430\u0437\u0440\u0430\u0431\u043e\u0442\u0430\u043d \u044d\u043a\u0441\u043f\u0435\u0440\u0438\u043c\u0435\u043d\u0442\u0430\u043b\u044c\u043d\u044b\u0439 \u043d\u0438\u0437\u043a\u043e\u0432\u043e\u043b\u044c\u0442\u043d\u044b\u0439 \u0432\u044b\u0441\u043e\u043a\u043e\u0434\u043e\u0437\u043e\u0432\u044b\u0439 \u043f\u043b\u0430\u0437\u043c\u0435\u043d\u043d\u043e-\u0438\u043c\u043c\u0435\u0440\u0441\u0438\u043e\u043d\u043d\u044b\u0439 \u0438\u043e\u043d\u043d\u044b\u0439 \u0438\u043c\u043f\u043b\u0430\u043d\u0442\u0435\u0440 \u0434\u043b\u044f \u0443\u043b\u044c\u0442\u0440\u0430\u043c\u0435\u043b\u043a\u043e\u0433\u043e \u043b\u0435\u0433\u0438\u0440\u043e\u0432\u0430\u043d\u0438\u044f \u0441\u0442\u043e\u043a\u0430\/\u0438\u0441\u0442\u043e\u043a\u0430 \u043d\u0430\u043d\u043e\u0442\u0440\u0430\u043d\u0437\u0438\u0441\u0442\u043e\u0440\u043e\u0432 \u0441 \u043f\u0440\u043e\u0435\u043a\u0442\u043d\u044b\u043c\u0438 \u043d\u043e\u0440\u043c\u0430\u043c\u0438 130 &#8211; 32 \u043d\u043c, \u043e\u0431\u043b\u0430\u0434\u0430\u044e\u0449\u0438\u0439 \u0443\u043d\u0438\u043a\u0430\u043b\u044c\u043d\u044b\u043c\u0438 \u0432\u043e\u0437\u043c\u043e\u0436\u043d\u043e\u0441\u0442\u044f\u043c\u0438<span class=\"more-link\"><a href=\"https:\/\/ftian.ru\/en\/razvitie-tehnologij-plazmenno-immersionnoj-ionnoj-implantacii\/\">\u041f\u043e\u0434\u0440\u043e\u0431\u043d\u0435\u0435<\/a><\/span><\/p>\n","protected":false},"author":1,"featured_media":840,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"ngg_post_thumbnail":0,"footnotes":""},"categories":[24],"tags":[],"class_list":["entry","author-admin-ftian","post-839","post","type-post","status-publish","format-standard","has-post-thumbnail","category-vazhnejshie-rezultaty"],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.9 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>\u0420\u0430\u0437\u0432\u0438\u0442\u0438\u0435 \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0439 \u043f\u043b\u0430\u0437\u043c\u0435\u043d\u043d\u043e-\u0438\u043c\u043c\u0435\u0440\u0441\u0438\u043e\u043d\u043d\u043e\u0439 \u0438\u043e\u043d\u043d\u043e\u0439 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