{"id":831,"date":"2019-12-06T08:02:21","date_gmt":"2019-12-06T08:02:21","guid":{"rendered":"https:\/\/normoprot.h1n.ru\/?p=831"},"modified":"2022-02-18T14:18:20","modified_gmt":"2022-02-18T14:18:20","slug":"issledovanie-novyh-processov-anizotropnogo-plazmohimicheskogo-travlenija-struktur-kremnievoj-nanojelektroniki","status":"publish","type":"post","link":"https:\/\/ftian.ru\/en\/issledovanie-novyh-processov-anizotropnogo-plazmohimicheskogo-travlenija-struktur-kremnievoj-nanojelektroniki\/","title":{"rendered":"\u0418\u0441\u0441\u043b\u0435\u0434\u043e\u0432\u0430\u043d\u0438\u0435 \u043d\u043e\u0432\u044b\u0445 \u043f\u0440\u043e\u0446\u0435\u0441\u0441\u043e\u0432 \u0430\u043d\u0438\u0437\u043e\u0442\u0440\u043e\u043f\u043d\u043e\u0433\u043e \u043f\u043b\u0430\u0437\u043c\u043e\u0445\u0438\u043c\u0438\u0447\u0435\u0441\u043a\u043e\u0433\u043e \u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u044f \u0441\u0442\u0440\u0443\u043a\u0442\u0443\u0440 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href='https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/issledovanie_novih_processov85634548.png'><img loading=\"lazy\" decoding=\"async\" width=\"520\" height=\"410\" src=\"https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/issledovanie_novih_processov85634548.png\" class=\"attachment-full size-full\" alt=\"\u0418\u0441\u0441\u043b\u0435\u0434\u043e\u0432\u0430\u043d\u0438\u0435 \u043d\u043e\u0432\u044b\u0445 \u043f\u0440\u043e\u0446\u0435\u0441\u0441\u043e\u0432 \u0430\u043d\u0438\u0437\u043e\u0442\u0440\u043e\u043f\u043d\u043e\u0433\u043e \u043f\u043b\u0430\u0437\u043c\u043e\u0445\u0438\u043c\u0438\u0447\u0435\u0441\u043a\u043e\u0433\u043e \u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u044f \u0441\u0442\u0440\u0443\u043a\u0442\u0443\u0440 \u043a\u0440\u0435\u043c\u043d\u0438\u0435\u0432\u043e\u0439 \u043d\u0430\u043d\u043e\u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u0438\u043a\u0438\" aria-describedby=\"gallery-1-832\" srcset=\"https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/issledovanie_novih_processov85634548.png 520w, https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/issledovanie_novih_processov85634548-300x237.png 300w, https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/issledovanie_novih_processov85634548-465x367.png 465w\" sizes=\"auto, (max-width: 520px) 100vw, 520px\" title=\"\u0418\u0441\u0441\u043b\u0435\u0434\u043e\u0432\u0430\u043d\u0438\u0435 \u043d\u043e\u0432\u044b\u0445 \u043f\u0440\u043e\u0446\u0435\u0441\u0441\u043e\u0432 \u0430\u043d\u0438\u0437\u043e\u0442\u0440\u043e\u043f\u043d\u043e\u0433\u043e \u043f\u043b\u0430\u0437\u043c\u043e\u0445\u0438\u043c\u0438\u0447\u0435\u0441\u043a\u043e\u0433\u043e \u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u044f \u0441\u0442\u0440\u0443\u043a\u0442\u0443\u0440 \u043a\u0440\u0435\u043c\u043d\u0438\u0435\u0432\u043e\u0439 \u043d\u0430\u043d\u043e\u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u0438\u043a\u0438\" \/><\/a>\r\n\t\t\t<\/div>\r\n\t\t\t\t<figcaption class='wp-caption-text gallery-caption' id='gallery-1-832'>\r\n\t\t\t\t\u0417\u0430\u0442\u0432\u043e\u0440\u043d\u044b\u0439 \u0441\u0442\u0435\u043a \u041c\u0414\u041f-\u043d\u0430\u043d\u043e\u0442\u0440\u0430\u043d\u0437\u0438\u0441\u0442\u043e\u0440\u0430 Si\/W\/Hf\u041e2\/Si \u0441 \u0434\u043b\u0438\u043d\u043e\u0439 \u043a\u0430\u043d\u0430\u043b\u0430 30 \u043d\u043c\r\n\t\t\t\t<\/figcaption><\/figure><figure class='gallery-item'>\r\n\t\t\t<div class='gallery-icon landscape'>\r\n\t\t\t\t<a href='https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/issledovanie_novih_processov18854378448.png'><img loading=\"lazy\" decoding=\"async\" width=\"407\" height=\"323\" src=\"https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/issledovanie_novih_processov18854378448.png\" class=\"attachment-full size-full\" alt=\"\u0418\u0441\u0441\u043b\u0435\u0434\u043e\u0432\u0430\u043d\u0438\u0435 \u043d\u043e\u0432\u044b\u0445 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\u0432\u044b\u0441\u043e\u043a\u043e\u0439 \u0447\u0443\u0432\u0441\u0442\u0432\u0438\u0442\u0435\u043b\u044c\u043d\u043e\u0441\u0442\u044c\u044e (\u043e\u043a\u043d\u0430 \u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u044f < 5% \u043f\u043b\u043e\u0449\u0430\u0434\u0438 \u043f\u043b\u0430\u0441\u0442\u0438\u043d\u044b).\r\n\t\t\t\t<\/figcaption><\/figure><\/div>\n\n<hr>\n<p><em>I<\/em><em>.<\/em><em>I<\/em><em>.<\/em><em>&nbsp;<\/em><em>Amirov, <\/em><em>S<\/em><em>.<\/em><em>N<\/em><em>.<\/em><em>&nbsp;<\/em><em>Averkin, <\/em><em>V<\/em><em>.<\/em><em>F<\/em><em>.<\/em><em>&nbsp;<\/em><em>Lukichev, <\/em><em>V<\/em><em>.<\/em><em>A<\/em><em>.<\/em><em>&nbsp;<\/em><em>Kalnov, <\/em><em>A<\/em><em>.<\/em><em>A<\/em><em>.<\/em><em>&nbsp;<\/em><em>Orlikovsky, <\/em><em>and <\/em><em><u>K<\/u><\/em><em><u>.<\/u><\/em><em><u>V<\/u><\/em><em><u>.<\/u><\/em><em><u>&nbsp;<\/u><\/em><em><u>Rudenko<\/u><strong>. <\/strong><\/em><em>Plasma processing in micro- and nanoelectronics: process design, in situ process diagnostics, and concept of equipment. <\/em><em>Nanotechnology International Forum, 1-3 November, 2010, Moscow. (2010).<\/em><\/p>\n<p><em>\u0410<\/em><em>.\u0410<\/em><em>.&nbsp;\u041e\u0440\u043b\u0438\u043a\u043e\u0432\u0441\u043a\u0438\u0439<\/em><em>, \u0412<\/em><em>.\u0424<\/em><em>.&nbsp;\u041b\u0443\u043a\u0438\u0447\u0435\u0432<\/em><em>, \u041a<\/em><em>.\u0412<\/em><em>.&nbsp;\u0420\u0443\u0434\u0435\u043d\u043a\u043e<\/em><em>, \u0410<\/em><em>.\u0421<\/em><em>.&nbsp;\u0420\u0443\u0434\u044b\u0439<\/em><em>. \u041a\u0440\u0438\u0442\u0438\u0447\u0435\u0441\u043a\u0438\u0435 \u044d\u043b\u0435\u043c\u0435\u043d\u0442\u044b \u043d\u0430\u043d\u043e\u0442\u0440\u0430\u043d\u0437\u0438\u0441\u0442\u043e\u0440\u043e\u0432: \u0444\u0438\u0437\u0438\u043a\u0430, \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u044f \u0438 \u043c\u0430\u0442\u0435\u0440\u0438\u0430\u043b\u044b.\/\/\u0418\u043d\u0442\u0435\u0433\u0440\u0430\u043b, \u21164, \u0441.10-17. (2010).<\/em><\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u0418\u0441\u0441\u043b\u0435\u0434\u043e\u0432\u0430\u043d\u0438\u044f \u0432 \u043e\u0431\u043b\u0430\u0441\u0442\u0438 \u0444\u0438\u0437\u0438\u043a\u0438 \u0438 \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0438 \u0437\u0430\u0442\u0432\u043e\u0440\u043d\u044b\u0445 \u0441\u0442\u0440\u0443\u043a\u0442\u0443\u0440 \u043a\u0440\u0435\u043c\u043d\u0438\u0435\u0432\u044b\u0445 \u041c\u0414\u041f-\u043d\u0430\u043d\u043e\u0442\u0440\u0430\u043d\u0437\u0438\u0441\u0442\u043e\u0440\u043e\u0432 (\u0442\u0430\u043a \u043d\u0430\u0437\u044b\u0432\u0430\u0435\u043c\u044b\u0445 HKMG-FET \u0442\u0440\u0430\u043d\u0437\u0438\u0441\u0442\u043e\u0440\u043e\u0432) \u0441 \u043f\u0440\u043e\u0435\u043a\u0442\u043d\u044b\u043c\u0438 \u043d\u043e\u0440\u043c\u0430\u043c\u0438 32 \u043d\u043c \u0438 \u043c\u0435\u043d\u0435\u0435 \u0441 \u0438\u0441\u043f\u043e\u043b\u044c\u0437\u043e\u0432\u0430\u043d\u0438\u0435\u043c high-K\u043f\u043e\u0434\u0437\u0430\u0442\u0432\u043e\u0440\u043d\u044b\u0445&nbsp; \u0434\u0438\u044d\u043b\u0435\u043a\u0442\u0440\u0438\u043a\u043e\u0432<span class=\"more-link\"><a href=\"https:\/\/ftian.ru\/en\/issledovanie-novyh-processov-anizotropnogo-plazmohimicheskogo-travlenija-struktur-kremnievoj-nanojelektroniki\/\">\u041f\u043e\u0434\u0440\u043e\u0431\u043d\u0435\u0435<\/a><\/span><\/p>\n","protected":false},"author":1,"featured_media":832,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"ngg_post_thumbnail":0,"footnotes":""},"categories":[24],"tags":[],"class_list":["entry","author-admin-ftian","post-831","post","type-post","status-publish","format-standard","has-post-thumbnail","category-vazhnejshie-rezultaty"],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.9 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ 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