{"id":800,"date":"2019-12-05T20:07:12","date_gmt":"2019-12-05T20:07:12","guid":{"rendered":"https:\/\/normoprot.h1n.ru\/?p=800"},"modified":"2022-02-18T14:15:27","modified_gmt":"2022-02-18T14:15:27","slug":"formirovanie-tonkih-sloev-podzatvornyh-dijelektrikov-s-vysokoj-dijelektricheskoj-pronicaemostju","status":"publish","type":"post","link":"https:\/\/ftian.ru\/en\/formirovanie-tonkih-sloev-podzatvornyh-dijelektrikov-s-vysokoj-dijelektricheskoj-pronicaemostju\/","title":{"rendered":"\u0424\u043e\u0440\u043c\u0438\u0440\u043e\u0432\u0430\u043d\u0438\u0435 \u0442\u043e\u043d\u043a\u0438\u0445 \u0441\u043b\u043e\u0435\u0432 \u043f\u043e\u0434\u0437\u0430\u0442\u0432\u043e\u0440\u043d\u044b\u0445 \u0434\u0438\u044d\u043b\u0435\u043a\u0442\u0440\u0438\u043a\u043e\u0432 \u0441 \u0432\u044b\u0441\u043e\u043a\u043e\u0439 \u0434\u0438\u044d\u043b\u0435\u043a\u0442\u0440\u0438\u0447\u0435\u0441\u043a\u043e\u0439 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\u0443\u0441\u0442\u0430\u043d\u043e\u0432\u043a\u0435 BalzersUMS-500 P \u0438 \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u044f \u043e\u0441\u0430\u0436\u0434\u0435\u043d\u0438\u044f \u043c\u0435\u0442\u043e\u0434\u043e\u043c \u043f\u043b\u0430\u0437\u043c\u043e\u0441\u0442\u0438\u043c\u0443\u043b\u0438\u0440\u043e\u0432\u0430\u043d\u043d\u043e\u0433\u043e \u0430\u0442\u043e\u043c\u043d\u043e-\u0441\u043b\u043e\u0435\u0432\u043e\u0433\u043e \u043e\u0441\u0430\u0436\u0434\u0435\u043d\u0438\u044f (P-ALD) \u043d\u0430 \u0443\u0441\u0442\u0430\u043d\u043e\u0432\u043a\u0435 FlexAl (Oxford Instruments, UK) \u043f\u043e\u0434 \u043a\u043e\u043d\u0442\u0440\u043e\u043b\u0435\u043c \u0441\u043f\u0435\u043a\u0442\u0440\u0430\u043b\u044c\u043d\u043e\u0439 \u044d\u043b\u043b\u0438\u043f\u0441\u043e\u043c\u0435\u0442\u0440\u0438\u0438 <em>in <\/em><em>situ<\/em>. \u041f\u043e\u043b\u0443\u0447\u0435\u043d\u044b \u0438 \u0438\u0441\u0441\u043b\u0435\u0434\u043e\u0432\u0430\u043d\u044b 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class='gallery-item'>\r\n\t\t\t<div class='gallery-icon landscape'>\r\n\t\t\t\t<a href='https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/formirovanie_tonkih_sloev86415315334.png'><img loading=\"lazy\" decoding=\"async\" width=\"559\" height=\"479\" src=\"https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/formirovanie_tonkih_sloev86415315334.png\" class=\"attachment-full size-full\" alt=\"\u0424\u043e\u0440\u043c\u0438\u0440\u043e\u0432\u0430\u043d\u0438\u0435 \u0442\u043e\u043d\u043a\u0438\u0445 \u0441\u043b\u043e\u0435\u0432 \u043f\u043e\u0434\u0437\u0430\u0442\u0432\u043e\u0440\u043d\u044b\u0445 \u0434\u0438\u044d\u043b\u0435\u043a\u0442\u0440\u0438\u043a\u043e\u0432 \u0441 \u0432\u044b\u0441\u043e\u043a\u043e\u0439 \u0434\u0438\u044d\u043b\u0435\u043a\u0442\u0440\u0438\u0447\u0435\u0441\u043a\u043e\u0439 \u043f\u0440\u043e\u043d\u0438\u0446\u0430\u0435\u043c\u043e\u0441\u0442\u044c\u044e\" aria-describedby=\"gallery-1-802\" srcset=\"https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/formirovanie_tonkih_sloev86415315334.png 559w, https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/formirovanie_tonkih_sloev86415315334-300x257.png 300w, https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/formirovanie_tonkih_sloev86415315334-465x398.png 465w\" sizes=\"auto, (max-width: 559px) 100vw, 559px\" title=\"\u0424\u043e\u0440\u043c\u0438\u0440\u043e\u0432\u0430\u043d\u0438\u0435 \u0442\u043e\u043d\u043a\u0438\u0445 \u0441\u043b\u043e\u0435\u0432 \u043f\u043e\u0434\u0437\u0430\u0442\u0432\u043e\u0440\u043d\u044b\u0445 \u0434\u0438\u044d\u043b\u0435\u043a\u0442\u0440\u0438\u043a\u043e\u0432 \u0441 \u0432\u044b\u0441\u043e\u043a\u043e\u0439 \u0434\u0438\u044d\u043b\u0435\u043a\u0442\u0440\u0438\u0447\u0435\u0441\u043a\u043e\u0439 \u043f\u0440\u043e\u043d\u0438\u0446\u0430\u0435\u043c\u043e\u0441\u0442\u044c\u044e\" \/><\/a>\r\n\t\t\t<\/div>\r\n\t\t\t\t<figcaption class='wp-caption-text gallery-caption' id='gallery-1-802'>\r\n\t\t\t\t\u0420\u0430\u0441\u043f\u0440\u0435\u0434\u0435\u043b\u0435\u043d\u0438\u0435 \u0442\u043e\u043b\u0449\u0438\u043d\u044b \u043f\u043b\u0435\u043d\u043a\u0438 HfO2 \u043f\u043e 100 \u043c\u043c \u043f\u043b\u0430\u0441\u0442\u0438\u043d\u0435. \u041d\u0435\u043e\u0434\u043d\u043e\u0440\u043e\u0434\u043d\u043e\u0441\u0442\u044c \u043d\u0435 \u043f\u0440\u0435\u0432\u044b\u0448\u0430\u0435\u0442 0.7%\r\n\t\t\t\t<\/figcaption><\/figure><figure class='gallery-item'>\r\n\t\t\t<div class='gallery-icon landscape'>\r\n\t\t\t\t<a href='https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/formirovanie_tonkih_sloev86454135453541.jpg'><img loading=\"lazy\" decoding=\"async\" width=\"1600\" height=\"1132\" src=\"https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/formirovanie_tonkih_sloev86454135453541.jpg\" class=\"attachment-full size-full\" alt=\"\u0424\u043e\u0440\u043c\u0438\u0440\u043e\u0432\u0430\u043d\u0438\u0435 \u0442\u043e\u043d\u043a\u0438\u0445 \u0441\u043b\u043e\u0435\u0432 \u043f\u043e\u0434\u0437\u0430\u0442\u0432\u043e\u0440\u043d\u044b\u0445 \u0434\u0438\u044d\u043b\u0435\u043a\u0442\u0440\u0438\u043a\u043e\u0432 \u0441 \u0432\u044b\u0441\u043e\u043a\u043e\u0439 \u0434\u0438\u044d\u043b\u0435\u043a\u0442\u0440\u0438\u0447\u0435\u0441\u043a\u043e\u0439 \u043f\u0440\u043e\u043d\u0438\u0446\u0430\u0435\u043c\u043e\u0441\u0442\u044c\u044e\" aria-describedby=\"gallery-1-803\" srcset=\"https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/formirovanie_tonkih_sloev86454135453541.jpg 1600w, https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/formirovanie_tonkih_sloev86454135453541-300x212.jpg 300w, https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/formirovanie_tonkih_sloev86454135453541-1024x725.jpg 1024w, https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/formirovanie_tonkih_sloev86454135453541-768x543.jpg 768w, https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/formirovanie_tonkih_sloev86454135453541-1536x1087.jpg 1536w, https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/formirovanie_tonkih_sloev86454135453541-2048x1449.jpg 2048w, https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/formirovanie_tonkih_sloev86454135453541-465x329.jpg 465w, https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/formirovanie_tonkih_sloev86454135453541-695x492.jpg 695w\" sizes=\"auto, (max-width: 1600px) 100vw, 1600px\" title=\"\u0424\u043e\u0440\u043c\u0438\u0440\u043e\u0432\u0430\u043d\u0438\u0435 \u0442\u043e\u043d\u043a\u0438\u0445 \u0441\u043b\u043e\u0435\u0432 \u043f\u043e\u0434\u0437\u0430\u0442\u0432\u043e\u0440\u043d\u044b\u0445 \u0434\u0438\u044d\u043b\u0435\u043a\u0442\u0440\u0438\u043a\u043e\u0432 \u0441 \u0432\u044b\u0441\u043e\u043a\u043e\u0439 \u0434\u0438\u044d\u043b\u0435\u043a\u0442\u0440\u0438\u0447\u0435\u0441\u043a\u043e\u0439 \u043f\u0440\u043e\u043d\u0438\u0446\u0430\u0435\u043c\u043e\u0441\u0442\u044c\u044e\" \/><\/a>\r\n\t\t\t<\/div>\r\n\t\t\t\t<figcaption class='wp-caption-text gallery-caption' 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\u0441\u043b\u043e\u0435\u0432 \u043f\u043e\u0434\u0437\u0430\u0442\u0432\u043e\u0440\u043d\u044b\u0445 \u0434\u0438\u044d\u043b\u0435\u043a\u0442\u0440\u0438\u043a\u043e\u0432 \u0441 \u0432\u044b\u0441\u043e\u043a\u043e\u0439 \u0434\u0438\u044d\u043b\u0435\u043a\u0442\u0440\u0438\u0447\u0435\u0441\u043a\u043e\u0439 \u043f\u0440\u043e\u043d\u0438\u0446\u0430\u0435\u043c\u043e\u0441\u0442\u044c\u044e\" \/><\/a>\r\n\t\t\t<\/div>\r\n\t\t\t\t<figcaption class='wp-caption-text gallery-caption' id='gallery-1-801'>\r\n\t\t\t\t\u0412\u043e\u043b\u044c\u0442\u0430\u043c\u043f\u0435\u0440\u043d\u0430\u044f \u0445\u0430\u0440\u0430\u043a\u0442\u0435\u0440\u0438\u0441\u0442\u0438\u043a\u0430 \u0437\u0430\u0442\u0432\u043e\u0440\u043d\u043e\u0439 \u0441\u0442\u0440\u0443\u043a\u0442\u0443\u0440\u044b  \u0442\u0440\u0430\u043d\u0437\u0438\u0441\u0442\u043e\u0440\u0430  Me\/HfO2 (4.2\u043d\u043c)\/Si\r\n\t\t\t\t<\/figcaption><\/figure><\/div>\n\n<p style=\"text-align: justify;\">\u041f\u043e\u043b\u0443\u0447\u0435\u043d\u043d\u044b\u0435 \u0437\u043d\u0430\u0447\u0435\u043d\u0438\u044f \u0434\u0438\u044d\u043b\u0435\u043a\u0442\u0440\u0438\u0447\u0435\u0441\u043a\u043e\u0439 \u043f\u0440\u043e\u043d\u0438\u0446\u0430\u0435\u043c\u043e\u0441\u0442\u0438 \u043f\u043b\u0435\u043d\u043a\u0438 HfO<sub>2 <\/sub>&nbsp;(23 &#8211; 25,2) \u0438 \u0442\u043e\u043a\u043e\u0432 \u0443\u0442\u0435\u0447\u0435\u043a \u0432 \u0441\u043e\u0441\u0442\u0430\u0432\u0435 \u0437\u0430\u0442\u0432\u043e\u0440\u043d\u044b\u0445 \u0441\u0442\u0440\u0443\u043a\u0442\u0443\u0440 (0,15 \u0410\/c\u043c<sup>2 <\/sup>\u043f\u0440\u0438 1\u0412) \u0441\u0443\u0449\u0435\u0441\u0442\u0432\u0435\u043d\u043d\u043e \u043b\u0443\u0447\u0448\u0435 \u0434\u043e\u043f\u0443\u0441\u0442\u0438\u043c\u044b\u0445 \u0437\u043d\u0430\u0447\u0435\u043d\u0438\u0439, \u043f\u0440\u0435\u0434\u0441\u043a\u0430\u0437\u0430\u043d\u043d\u044b\u0445 \u0432 ITRS \u043d\u0430 2018 \u0433. \u0434\u043b\u044f \u043f\u0435\u0440\u0441\u043f\u0435\u043a\u0442\u0438\u0432\u043d\u044b\u0445 \u043d\u0430\u043d\u043e\u0442\u0440\u0430\u043d\u0437\u0438\u0441\u0442\u043e\u0440\u043e\u0432 \u0423\u0411\u0418\u0421 \u043f\u0440\u043e\u0446\u0435\u0441\u0441\u043e\u0440\u043e\u0432 \u0438 \u0441\u0445\u0435\u043c \u0441 \u043c\u0430\u043b\u044b\u043c \u043f\u043e\u0442\u0440\u0435\u0431\u043b\u0435\u043d\u0438\u0435\u043c \u044d\u043d\u0435\u0440\u0433\u0438\u0438.<\/p>\n<hr>\n<p><em>\u0410.\u0413. \u0412\u0430\u0441\u0438\u043b\u044c\u0435\u0432, \u0420.\u0410. \u0417\u0430\u0445\u0430\u0440\u043e\u0432, \u0410.\u0410. \u041e\u0440\u043b\u0438\u043a\u043e\u0432\u0441\u043a\u0438\u0439, \u0410.\u0415. \u0420\u043e\u0433\u043e\u0436\u0438\u043d, \u041c.\u0421. \u0421\u043e\u043d\u0438\u043d, \u0418.\u0410. \u0425\u043e\u0440\u0438\u043d, \u042d\u043b\u0435\u043a\u0442\u0440\u043e\u0444\u0438\u0437\u0438\u0447\u0435\u0441\u043a\u0438\u0435 \u0445\u0430\u0440\u0430\u043a\u0442\u0435\u0440\u0438\u0441\u0442\u0438\u043a\u0438 \u0437\u0430\u0442\u0432\u043e\u0440\u043d\u044b\u0445 \u0441\u0442\u0440\u0443\u043a\u0442\u0443\u0440 \u0441 <\/em><em>HfO<sub>2<\/sub><\/em><em>, \u0441\u0444\u043e\u0440\u043c\u0438\u0440\u043e\u0432\u0430\u043d\u043d\u044b\u0445 \u043c\u0435\u0442\u043e\u0434\u043e\u043c \u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u043d\u043e-\u043b\u0443\u0447\u0435\u0432\u043e\u0433\u043e \u0438\u0441\u043f\u0430\u0440\u0435\u043d\u0438\u044f\/\/ \u041c\u0438\u043a\u0440\u043e\u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u0438\u043a\u0430, \u0422. 38, 2009, \u0421. 361-368.<\/em><\/p>\n<p><em>\u0410<\/em><em>.<\/em><em>Miakonkikh, A. Rogozhin, K. Rudenko, and A. Orlikovsky, Properties of thin HfO<sub>2<\/sub> gate dielectric formed in Atomic Layer Deposition process, Book of <\/em><em>Abstracts, <\/em><em>International Conference Micro- and Nanoelectronics-2012, Zvenigorod, Russia, 1-5 October, 2012<\/em><em>.<\/em><\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u0418\u0441\u0441\u043b\u0435\u0434\u043e\u0432\u0430\u043d\u044b \u043f\u0440\u043e\u0446\u0435\u0441\u0441\u044b \u043e\u0441\u0430\u0436\u0434\u0435\u043d\u0438\u044f \u043e\u043a\u0441\u0438\u0434\u0430 \u0433\u0430\u0444\u043d\u0438\u044f \u0441 \u0446\u0435\u043b\u044c\u044e \u0444\u043e\u0440\u043c\u0438\u0440\u043e\u0432\u0430\u043d\u0438\u044f \u0441\u043b\u043e\u0435\u0432 \u043f\u043e\u0434\u0437\u0430\u0442\u0432\u043e\u0440\u043d\u044b\u0445 \u0434\u0438\u044d\u043b\u0435\u043a\u0442\u0440\u0438\u043a\u043e\u0432 \u0441 \u0432\u044b\u0441\u043e\u043a\u043e\u0439 \u0434\u0438\u044d\u043b\u0435\u043a\u0442\u0440\u0438\u0447\u0435\u0441\u043a\u043e\u0439 \u043f\u0440\u043e\u043d\u0438\u0446\u0430\u0435\u043c\u043e\u0441\u0442\u044c\u044e \u0432 \u041c\u0414\u041f-\u043d\u0430\u043d\u043e\u0442\u0440\u0430\u043d\u0437\u0438\u0441\u0442\u043e\u0440\u0430\u0445. \u0420\u0430\u0437\u0440\u0430\u0431\u043e\u0442\u0430\u043d\u044b \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u044f \u043f\u043e\u043b\u0443\u0447\u0435\u043d\u0438\u044f \u0442\u043e\u043d\u043a\u0438\u0445 \u0441\u043b\u043e\u0435\u0432 \u043e\u043a\u0441\u0438\u0434\u0430 \u0433\u0430\u0444\u043d\u0438\u044f \u043c\u0435\u0442\u043e\u0434\u043e\u043c<span class=\"more-link\"><a href=\"https:\/\/ftian.ru\/en\/formirovanie-tonkih-sloev-podzatvornyh-dijelektrikov-s-vysokoj-dijelektricheskoj-pronicaemostju\/\">\u041f\u043e\u0434\u0440\u043e\u0431\u043d\u0435\u0435<\/a><\/span><\/p>\n","protected":false},"author":1,"featured_media":802,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"ngg_post_thumbnail":0,"footnotes":""},"categories":[24],"tags":[],"class_list":["entry","author-admin-ftian","post-800","post","type-post","status-publish","format-standard","has-post-thumbnail","category-vazhnejshie-rezultaty"],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.9 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>\u0424\u043e\u0440\u043c\u0438\u0440\u043e\u0432\u0430\u043d\u0438\u0435 \u0442\u043e\u043d\u043a\u0438\u0445 \u0441\u043b\u043e\u0435\u0432 \u043f\u043e\u0434\u0437\u0430\u0442\u0432\u043e\u0440\u043d\u044b\u0445 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