{"id":773,"date":"2019-12-05T17:12:41","date_gmt":"2019-12-05T17:12:41","guid":{"rendered":"https:\/\/normoprot.h1n.ru\/?p=773"},"modified":"2022-02-18T14:14:38","modified_gmt":"2022-02-18T14:14:38","slug":"fizicheskie-osnovy-tehnologii-silidizacii-kontaktov-v-gluboko-submikronnyh-kmop-sbis","status":"publish","type":"post","link":"https:\/\/ftian.ru\/en\/fizicheskie-osnovy-tehnologii-silidizacii-kontaktov-v-gluboko-submikronnyh-kmop-sbis\/","title":{"rendered":"\u0424\u0438\u0437\u0438\u0447\u0435\u0441\u043a\u0438\u0435 \u043e\u0441\u043d\u043e\u0432\u044b \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0438 \u0441\u0438\u043b\u0438\u0434\u0438\u0437\u0430\u0446\u0438\u0438 \u043a\u043e\u043d\u0442\u0430\u043a\u0442\u043e\u0432 \u0432 \u0433\u043b\u0443\u0431\u043e\u043a\u043e \u0441\u0443\u0431\u043c\u0438\u043a\u0440\u043e\u043d\u043d\u044b\u0445 \u041a\u041c\u041e\u041f \u0421\u0411\u0418\u0421"},"content":{"rendered":"<p style=\"text-align: justify;\">\u0412 \u043e\u0431\u043b\u0430\u0441\u0442\u0438 \u043f\u0440\u043e\u0431\u043b\u0435\u043c \u043c\u0435\u0442\u0430\u043b\u043b\u0438\u0437\u0430\u0446\u0438\u0438 \u043a\u0440\u0435\u043c\u043d\u0438\u0435\u0432\u044b\u0445 \u0421\u0411\u0418\u0421 \u0432\u044b\u043f\u043e\u043b\u043d\u0435\u043d\u044b \u043f\u0440\u0438\u043e\u0440\u0438\u0442\u0435\u0442\u043d\u044b\u0435 \u0438\u0441\u0441\u043b\u0435\u0434\u043e\u0432\u0430\u043d\u0438\u044f \u0444\u0438\u0437\u0438\u0447\u0435\u0441\u043a\u0438\u0445 \u043e\u0441\u043d\u043e\u0432 \u0441\u0430\u043c\u043e\u0441\u043e\u0432\u043c\u0435\u0449\u0435\u043d\u043d\u043e\u0439 \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0438 \u0441\u0438\u043b\u0438\u0434\u0438\u0437\u0430\u0446\u0438\u0438 \u043a\u043e\u043d\u0442\u0430\u043a\u0442\u043e\u0432 \u0432 \u0433\u043b\u0443\u0431\u043e\u043a\u043e \u0441\u0443\u0431\u043c\u0438\u043a\u0440\u043e\u043d\u043d\u044b\u0445 \u041a\u041c\u041e\u041f \u0421\u0411\u0418\u0421 \u043d\u0430 \u043e\u0441\u043d\u043e\u0432\u0435 \u0434\u0438\u0441\u0438\u043b\u0438\u0446\u0438\u0434\u0430 \u0442\u0438\u0442\u0430\u043d\u0430 (TiSi<sub>2<\/sub>) \u0438 \u0434\u0438\u0441\u0438\u043b\u0438\u0446\u0438\u0434\u0430 \u043a\u043e\u0431\u0430\u043b\u044c\u0442\u0430 (CoSi<sub>2<\/sub>), \u0438\u0437\u0443\u0447\u0435\u043d\u0430 \u0441\u0442\u0430\u0431\u0438\u043b\u044c\u043d\u043e\u0441\u0442\u044c \u043c\u043d\u043e\u0433\u043e\u0441\u043b\u043e\u0439\u043d\u044b\u0445 \u0441\u0438\u0441\u0442\u0435\u043c \u043c\u0435\u0442\u0430\u043b\u043b\u0438\u0437\u0430\u0446\u0438\u0438 Si-TiSi<sub>2<\/sub>-Al \u0438&nbsp; Si-TiSi<sub>2<\/sub> (TiN)-W-Al, \u0440\u0430\u0437\u0432\u0438\u0442 \u043d\u043e\u0432\u044b\u0439 \u043f\u043e\u0434\u0445\u043e\u0434 \u043a \u0444\u043e\u0440\u043c\u0438\u0440\u043e\u0432\u0430\u043d\u0438\u044e \u043c\u0435\u0442\u0430\u043b\u043b\u0438\u0437\u0430\u0446\u0438\u0438 \u0432 \u0440\u0435\u0437\u0443\u043b\u044c\u0442\u0430\u0442\u0435 \u0444\u0430\u0437\u043e\u0432\u043e\u0433\u043e \u0440\u0430\u0441\u0441\u043b\u043e\u0435\u043d\u0438\u044f \u0432 \u0441\u0438\u0441\u0442\u0435\u043c\u0430\u0445 Ti-Co-N\/CoSi<sub>2<\/sub>\/Si \u0432 \u0443\u0441\u043b\u043e\u0432\u0438\u044f\u0445 \u043f\u043e\u0432\u0435\u0440\u0445\u043d\u043e\u0441\u0442\u043d\u043e-\u0434\u0438\u0444\u0444\u0443\u0437\u0438\u043e\u043d\u043d\u044b\u0445 \u0440\u0435\u0430\u043a\u0446\u0438\u0439 \u0432 \u043f\u0440\u043e\u0446\u0435\u0441\u0441\u0435 \u043d\u0430\u043d\u0435\u0441\u0435\u043d\u0438\u044f, \u043d\u0430\u0439\u0434\u0435\u043d\u044b \u0443\u0441\u043b\u043e\u0432\u0438\u044f \u0444\u043e\u0440\u043c\u0438\u0440\u043e\u0432\u0430\u043d\u0438\u044f \u043f\u043b\u0430\u043d\u0430\u0440\u043d\u044b\u0445 \u0433\u0440\u0430\u043d\u0438\u0446 TiSi<sub>2<\/sub> \u0438 CoSi<sub>2<\/sub>&nbsp; \u0441 Si \u0438 \u043d\u0430\u0434\u0435\u0436\u043d\u044b\u0445 \u0431\u0430\u0440\u044c\u0435\u0440\u043d\u044b\u0445 \u0441\u043b\u043e\u0435\u0432 \u0432 \u0441\u043e\u0432\u0440\u0435\u043c\u0435\u043d\u043d\u044b\u0445 \u0441\u0438\u0441\u0442\u0435\u043c\u0430\u0445 \u0441\u043e\u0435\u0434\u0438\u043d\u0435\u043d\u0438\u0439 \u043d\u0430 \u043e\u0441\u043d\u043e\u0432\u0435 Cu.<\/p>\n<div id='gallery-1' class='gallery galleryid-773 gallery-columns-2 gallery-size-thumbnail'><figure class='gallery-item'>\r\n\t\t\t<div class='gallery-icon landscape'>\r\n\t\t\t\t<a href='https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/atomnie_mehanizmi_3_124564744.jpg'><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/atomnie_mehanizmi_3_124564744-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail\" alt=\"\u0424\u0438\u0437\u0438\u0447\u0435\u0441\u043a\u0438\u0435 \u043e\u0441\u043d\u043e\u0432\u044b \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0438 \u0441\u0438\u043b\u0438\u0434\u0438\u0437\u0430\u0446\u0438\u0438 \u043a\u043e\u043d\u0442\u0430\u043a\u0442\u043e\u0432 \u0432 \u0433\u043b\u0443\u0431\u043e\u043a\u043e \u0441\u0443\u0431\u043c\u0438\u043a\u0440\u043e\u043d\u043d\u044b\u0445 \u041a\u041c\u041e\u041f \u0421\u0411\u0418\u0421\" aria-describedby=\"gallery-1-982\" title=\"\u0424\u0438\u0437\u0438\u0447\u0435\u0441\u043a\u0438\u0435 \u043e\u0441\u043d\u043e\u0432\u044b \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0438 \u0441\u0438\u043b\u0438\u0434\u0438\u0437\u0430\u0446\u0438\u0438 \u043a\u043e\u043d\u0442\u0430\u043a\u0442\u043e\u0432 \u0432 \u0433\u043b\u0443\u0431\u043e\u043a\u043e \u0441\u0443\u0431\u043c\u0438\u043a\u0440\u043e\u043d\u043d\u044b\u0445 \u041a\u041c\u041e\u041f \u0421\u0411\u0418\u0421\" \/><\/a>\r\n\t\t\t<\/div>\r\n\t\t\t\t<figcaption class='wp-caption-text gallery-caption' id='gallery-1-982'>\r\n\t\t\t\t\u041f\u042d\u041c \u0438\u0437\u043e\u0431\u0440\u0430\u0436\u0435\u043d\u0438\u044f \u0441\u0442\u0440\u0443\u043a\u0442\u0443\u0440 TiSi2\/Si  \u0438  TiN\/CoSix\/Si.\r\n\t\t\t\t<\/figcaption><\/figure><figure class='gallery-item'>\r\n\t\t\t<div class='gallery-icon portrait'>\r\n\t\t\t\t<a href='https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/atomnie_mehanizmi_3_4524156744.jpg'><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/atomnie_mehanizmi_3_4524156744-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail\" alt=\"\u0424\u0438\u0437\u0438\u0447\u0435\u0441\u043a\u0438\u0435 \u043e\u0441\u043d\u043e\u0432\u044b \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0438 \u0441\u0438\u043b\u0438\u0434\u0438\u0437\u0430\u0446\u0438\u0438 \u043a\u043e\u043d\u0442\u0430\u043a\u0442\u043e\u0432 \u0432 \u0433\u043b\u0443\u0431\u043e\u043a\u043e \u0441\u0443\u0431\u043c\u0438\u043a\u0440\u043e\u043d\u043d\u044b\u0445 \u041a\u041c\u041e\u041f \u0421\u0411\u0418\u0421\" aria-describedby=\"gallery-1-983\" title=\"\u0424\u0438\u0437\u0438\u0447\u0435\u0441\u043a\u0438\u0435 \u043e\u0441\u043d\u043e\u0432\u044b \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0438 \u0441\u0438\u043b\u0438\u0434\u0438\u0437\u0430\u0446\u0438\u0438 \u043a\u043e\u043d\u0442\u0430\u043a\u0442\u043e\u0432 \u0432 \u0433\u043b\u0443\u0431\u043e\u043a\u043e \u0441\u0443\u0431\u043c\u0438\u043a\u0440\u043e\u043d\u043d\u044b\u0445 \u041a\u041c\u041e\u041f \u0421\u0411\u0418\u0421\" \/><\/a>\r\n\t\t\t<\/div>\r\n\t\t\t\t<figcaption class='wp-caption-text gallery-caption' id='gallery-1-983'>\r\n\t\t\t\t\u041f\u042d\u041c \u0438\u0437\u043e\u0431\u0440\u0430\u0436\u0435\u043d\u0438\u044f \u0441\u0442\u0440\u0443\u043a\u0442\u0443\u0440 TiSi2\/Si  \u0438  TiN\/CoSix\/Si.\r\n\t\t\t\t<\/figcaption><\/figure><\/div>\n\n<hr>\n<p><em>K.A.Valiev, A.G.Vasiliev, A.A.Orlikovsky, A.L.Vasiliev, A.L.Golovin, R.M.Imamov, N.A.Kiselev.Structure and properties of TiSi<sub>2<\/sub> films on Si, obtained by Ti and Si c\u043e<\/em><em>-evaporation in high vacuum.||Vacuum, vol.42, No.18, p\/1191 \u2013 1201.<\/em><\/p>\n<p><em>\u0412\u0430\u0441\u0438\u043b\u044c\u0435\u0432\u0410<\/em><em>.\u0413<\/em><em>., \u0417\u0430\u0445\u0430\u0440\u043e\u0432\u0420<\/em><em>.\u0410<\/em><em>., \u0420\u043e\u0434\u0430\u0442\u0438\u0441\u0412<\/em><em>.\u0412<\/em><em>., \u041b\u043e\u0431\u0438\u043d\u0446\u043e\u0432\u0410<\/em><em>.\u0412<\/em><em>., \u041e\u0440\u043b\u0438\u043a\u043e\u0432\u0441\u043a\u0438\u0439\u0410<\/em><em>.\u0410<\/em><em>., \u0425\u043e\u0440\u0438\u043d\u0418<\/em><em>.\u0424\u0430\u0437\u043e\u043e\u0431\u0440\u0430\u0437\u043e\u0432\u0430\u043d\u0438\u0435\u0432\u043c\u043d\u043e\u0433\u043e\u043a\u043e\u043c\u043f\u043e\u043d\u0435\u043d\u0442\u043d\u044b\u0445\u0441\u0438\u0441\u0442\u0435\u043c\u0430\u0445<\/em><em>Ti-Co-Si-N\u0438<\/em><em>Ti-Co-N\u043f\u0440\u0438\u043f\u043e\u0432\u0435\u0440\u0445\u043d\u043e\u0441\u0442\u043d\u043e<\/em><em>-\u0434\u0438\u0444\u0444\u0443\u0437\u0438\u043e\u043d\u043d\u043e\u043c\u043c\u0435\u0445\u0430\u043d\u0438\u0437\u043c\u0435\u0444\u043e\u0440\u043c\u0438\u0440\u043e\u0432\u0430\u043d\u0438\u044f\u0442\u043e\u043d\u043a\u0438\u0445\u043f\u043b\u0435\u043d\u043e\u043a\u043d\u0430<\/em><em>Si\u0438<\/em><em>SiO<sub>2<\/sub>, ||\u041c\u0438\u043a\u0440\u043e\u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u0438\u043a\u0430\u0422<\/em><em>.30, \u2116 5, \u0441<\/em><em>. 345-352 (2001).<\/em><\/p>\n<p><em>Vasiliev A.L., Aindow M., Vasiliev A.G., Orlikovsky A.A., Horin I.A.Phase Formation in Ti (Ta)-Ni and Co-Ti Films Deposited on (001)Si in N<sub>2<\/sub> Atmosphere. ||<\/em><em>Mat. <\/em><em>Res. <\/em><em>Soc. <\/em><em>Proc., <\/em><em>SymposiumN, <\/em><em>V. 745, <\/em><em>N4.10 (2003).<\/em><\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u0412 \u043e\u0431\u043b\u0430\u0441\u0442\u0438 \u043f\u0440\u043e\u0431\u043b\u0435\u043c \u043c\u0435\u0442\u0430\u043b\u043b\u0438\u0437\u0430\u0446\u0438\u0438 \u043a\u0440\u0435\u043c\u043d\u0438\u0435\u0432\u044b\u0445 \u0421\u0411\u0418\u0421 \u0432\u044b\u043f\u043e\u043b\u043d\u0435\u043d\u044b \u043f\u0440\u0438\u043e\u0440\u0438\u0442\u0435\u0442\u043d\u044b\u0435 \u0438\u0441\u0441\u043b\u0435\u0434\u043e\u0432\u0430\u043d\u0438\u044f \u0444\u0438\u0437\u0438\u0447\u0435\u0441\u043a\u0438\u0445 \u043e\u0441\u043d\u043e\u0432 \u0441\u0430\u043c\u043e\u0441\u043e\u0432\u043c\u0435\u0449\u0435\u043d\u043d\u043e\u0439 \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0438 \u0441\u0438\u043b\u0438\u0434\u0438\u0437\u0430\u0446\u0438\u0438 \u043a\u043e\u043d\u0442\u0430\u043a\u0442\u043e\u0432 \u0432 \u0433\u043b\u0443\u0431\u043e\u043a\u043e \u0441\u0443\u0431\u043c\u0438\u043a\u0440\u043e\u043d\u043d\u044b\u0445 \u041a\u041c\u041e\u041f \u0421\u0411\u0418\u0421 \u043d\u0430 \u043e\u0441\u043d\u043e\u0432\u0435 \u0434\u0438\u0441\u0438\u043b\u0438\u0446\u0438\u0434\u0430 \u0442\u0438\u0442\u0430\u043d\u0430 (TiSi2)<span class=\"more-link\"><a href=\"https:\/\/ftian.ru\/en\/fizicheskie-osnovy-tehnologii-silidizacii-kontaktov-v-gluboko-submikronnyh-kmop-sbis\/\">\u041f\u043e\u0434\u0440\u043e\u0431\u043d\u0435\u0435<\/a><\/span><\/p>\n","protected":false},"author":1,"featured_media":979,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"ngg_post_thumbnail":0,"footnotes":""},"categories":[24],"tags":[],"class_list":["entry","author-admin-ftian","post-773","post","type-post","status-publish","format-standard","has-post-thumbnail","category-vazhnejshie-rezultaty"],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.9 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>\u0424\u0438\u0437\u0438\u0447\u0435\u0441\u043a\u0438\u0435 \u043e\u0441\u043d\u043e\u0432\u044b \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0438 \u0441\u0438\u043b\u0438\u0434\u0438\u0437\u0430\u0446\u0438\u0438 \u043a\u043e\u043d\u0442\u0430\u043a\u0442\u043e\u0432 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