{"id":2448,"date":"2020-02-18T13:32:02","date_gmt":"2020-02-18T13:32:02","guid":{"rendered":"https:\/\/normoprot.h1n.ru\/?p=2448"},"modified":"2022-02-18T13:38:14","modified_gmt":"2022-02-18T13:38:14","slug":"perekljuchatel-na-osnove-tehnologii-mikrojelektromehanicheskih-sistem-mjems","status":"publish","type":"post","link":"https:\/\/ftian.ru\/en\/perekljuchatel-na-osnove-tehnologii-mikrojelektromehanicheskih-sistem-mjems\/","title":{"rendered":"\u041f\u0435\u0440\u0435\u043a\u043b\u044e\u0447\u0430\u0442\u0435\u043b\u044c \u043d\u0430 \u043e\u0441\u043d\u043e\u0432\u0435 \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0438 \u043c\u0438\u043a\u0440\u043e\u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043c\u0435\u0445\u0430\u043d\u0438\u0447\u0435\u0441\u043a\u0438\u0445 \u0441\u0438\u0441\u0442\u0435\u043c (\u041c\u042d\u041c\u0421)"},"content":{"rendered":"<p><strong>\u0410\u0432\u0442\u043e\u0440\u044b:<\/strong> \u0418.\u0412. \u0423\u0432\u0430\u0440\u043e\u0432, \u0412.\u0412. \u041d\u0430\u0443\u043c\u043e\u0432, \u041e.\u041c. \u041a\u043e\u0440\u043e\u043b\u0435\u0432\u0430, \u0415.\u0418. \u0412\u0430\u0433\u0430\u043d\u043e\u0432\u0430, \u041c.\u041e. \u0418\u0437\u044e\u043c\u043e\u0432, \u0418.\u0418.&nbsp; \u0410\u043c\u0438\u0440\u043e\u0432<\/p>\n<p>\u0420\u0430\u0437\u0440\u0430\u0431\u043e\u0442\u0430\u043d \u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043c\u0435\u0445\u0430\u043d\u0438\u0447\u0435\u0441\u043a\u0438\u0439 \u043f\u0435\u0440\u0435\u043a\u043b\u044e\u0447\u0430\u0442\u0435\u043b\u044c \u043c\u0438\u043a\u0440\u043e\u043d\u043d\u044b\u0445 \u0440\u0430\u0437\u043c\u0435\u0440\u043e\u0432. \u0418\u0437\u0434\u0435\u043b\u0438\u0435 \u043f\u0440\u0435\u0434\u0441\u0442\u0430\u0432\u043b\u044f\u0435\u0442 \u0441\u043e\u0431\u043e\u0439 \u043f\u043e\u0434\u0432\u0438\u0436\u043d\u0443\u044e \u043c\u0435\u0442\u0430\u043b\u043b\u0438\u0447\u0435\u0441\u043a\u0443\u044e \u0431\u0430\u043b\u043a\u0443, \u0440\u0430\u0441\u043f\u043e\u043b\u043e\u0436\u0435\u043d\u043d\u0443\u044e \u043d\u0430\u0434 \u0443\u043f\u0440\u0430\u0432\u043b\u044f\u044e\u0449\u0438\u043c\u0438 \u0438 \u0441\u0438\u0433\u043d\u0430\u043b\u044c\u043d\u044b\u043c\u0438 \u044d\u043b\u0435\u043a\u0442\u0440\u043e\u0434\u0430\u043c\u0438. \u0420\u0430\u0437\u043b\u0438\u0447\u043d\u044b\u0435 \u0432\u0430\u0440\u0438\u0430\u043d\u0442\u044b \u0438\u0441\u043f\u043e\u043b\u043d\u0435\u043d\u0438\u044f \u043f\u0440\u0435\u0434\u0441\u0442\u0430\u0432\u043b\u0435\u043d\u044b \u043d\u0430 \u0440\u0438\u0441\u0443\u043d\u043a\u0430\u0445. \u0412 \u043f\u0435\u0440\u0435\u043a\u043b\u044e\u0447\u0430\u0442\u0435\u043b\u0435 \u0438\u0441\u043f\u043e\u043b\u044c\u0437\u043e\u0432\u0430\u043d \u044d\u043b\u0435\u043a\u0442\u0440\u043e\u0441\u0442\u0430\u0442\u0438\u0447\u0435\u0441\u043a\u0438\u0439 \u043f\u0440\u0438\u043d\u0446\u0438\u043f \u0443\u043f\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u044f. \u041e\u0441\u043d\u043e\u0432\u043d\u044b\u043c \u043e\u0442\u043b\u0438\u0447\u0438\u0435\u043c \u0438\u0437\u0434\u0435\u043b\u0438\u044f \u043e\u0442 \u0438\u0437\u0432\u0435\u0441\u0442\u043d\u044b\u0445 \u041c\u042d\u041c\u0421-\u043f\u0435\u0440\u0435\u043a\u043b\u044e\u0447\u0430\u0442\u0435\u043b\u0435\u0439 \u044f\u0432\u043b\u044f\u0435\u0442\u0441\u044f \u0432\u0441\u0442\u0440\u043e\u0435\u043d\u043d\u044b\u0439 \u043c\u0435\u0445\u0430\u043d\u0438\u0437\u043c \u0430\u043a\u0442\u0438\u0432\u043d\u043e\u0433\u043e \u0440\u0430\u0437\u043c\u044b\u043a\u0430\u043d\u0438\u044f, \u043e\u0431\u0435\u0441\u043f\u0435\u0447\u0438\u0432\u0430\u044e\u0449\u0438\u0439 \u0437\u0430\u0449\u0438\u0442\u0443 \u043a\u043e\u043d\u0442\u0430\u043a\u0442\u043e\u0432 \u043e\u0442 \u0437\u0430\u043b\u0438\u043f\u0430\u043d\u0438\u044f. \u041a\u043b\u044e\u0447 \u0438\u0437\u0433\u043e\u0442\u0430\u0432\u043b\u0438\u0432\u0430\u0435\u0442\u0441\u044f \u043f\u043e \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0438 \u043c\u0438\u043a\u0440\u043e\u0441\u0438\u0441\u0442\u0435\u043c\u043d\u043e\u0439 \u0442\u0435\u0445\u043d\u0438\u043a\u0438 \u043d\u0430 \u043f\u043b\u0430\u0441\u0442\u0438\u043d\u0430\u0445 \u043a\u0440\u0435\u043c\u043d\u0438\u044f \u0438\u043b\u0438 \u0430\u0440\u0441\u0435\u043d\u0438\u0434\u0430 \u0433\u0430\u043b\u043b\u0438\u044f. \u041f\u0440\u043e\u0446\u0435\u0441\u0441 \u0438\u0437\u0433\u043e\u0442\u043e\u0432\u043b\u0435\u043d\u0438\u044f \u0441\u043e\u0432\u043c\u0435\u0441\u0442\u0438\u043c \u0441 \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0435\u0439 \u0438\u043d\u0442\u0435\u0433\u0440\u0430\u043b\u044c\u043d\u044b\u0445 \u0441\u0445\u0435\u043c. \u041e\u0441\u043d\u043e\u0432\u043d\u044b\u0435 \u0440\u0430\u0431\u043e\u0447\u0438\u0435 \u0445\u0430\u0440\u0430\u043a\u0442\u0435\u0440\u0438\u0441\u0442\u0438\u043a\u0438 \u0438\u0437\u0434\u0435\u043b\u0438\u044f \u043f\u0440\u0435\u0434\u0441\u0442\u0430\u0432\u043b\u0435\u043d\u044b \u0432 \u0442\u0430\u0431\u043b\u0438\u0446\u0435. \u041f\u0435\u0440\u0435\u043a\u043b\u044e\u0447\u0430\u0442\u0435\u043b\u044c \u0441\u043e\u0447\u0435\u0442\u0430\u0435\u0442 \u0432 \u0441\u0435\u0431\u0435 \u0434\u043e\u0441\u0442\u043e\u0438\u043d\u0441\u0442\u0432\u0430 \u0442\u0440\u0430\u0434\u0438\u0446\u0438\u043e\u043d\u043d\u044b\u0445 \u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043c\u0435\u0445\u0430\u043d\u0438\u0447\u0435\u0441\u043a\u0438\u0445 \u0438 \u043f\u043e\u043b\u0443\u043f\u0440\u043e\u0432\u043e\u0434\u043d\u0438\u043a\u043e\u0432\u044b\u0445 \u043a\u043b\u044e\u0447\u0435\u0439, \u0438 \u043f\u043e\u044d\u0442\u043e\u043c\u0443 \u0440\u0430\u0441\u0441\u043c\u0430\u0442\u0440\u0438\u0432\u0430\u0435\u0442\u0441\u044f \u0432 \u043a\u0430\u0447\u0435\u0441\u0442\u0432\u0435 \u0430\u043b\u044c\u0442\u0435\u0440\u043d\u0430\u0442\u0438\u0432\u044b \u044d\u0442\u0438\u043c \u0438\u0437\u0434\u0435\u043b\u0438\u044f\u043c \u0432 \u0440\u0430\u0434\u0438\u043e\u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u043d\u044b\u0445 \u0443\u0441\u0442\u0440\u043e\u0439\u0441\u0442\u0432\u0430\u0445 \u0412\u0427- \u0438 \u0421\u0412\u0427-\u0434\u0438\u0430\u043f\u0430\u0437\u043e\u043d\u043e\u0432.<\/p>\n<p style=\"text-align: center;\">\u0420\u0438\u0441\u0443\u043d\u043e\u043a \u2013 \u041c\u042d\u041c\u0421-\u043f\u0435\u0440\u0435\u043a\u043b\u044e\u0447\u0430\u0442\u0435\u043b\u044c \u0432 \u0440\u0430\u0437\u043b\u0438\u0447\u043d\u044b\u0445 \u043a\u043e\u043d\u0444\u0438\u0433\u0443\u0440\u0430\u0446\u0438\u044f\u0445<\/p>\n<div id='gallery-1' class='gallery galleryid-2448 gallery-columns-3 gallery-size-medium'><figure class='gallery-item'>\r\n\t\t\t<div class='gallery-icon landscape'>\r\n\t\t\t\t<a href='https:\/\/ftian.ru\/wp-content\/uploads\/2022\/01\/nauka-vajn-rezult841696469.jpg'><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"276\" src=\"https:\/\/ftian.ru\/wp-content\/uploads\/2022\/01\/nauka-vajn-rezult841696469-300x276.jpg\" class=\"attachment-medium size-medium\" alt=\"Important results\" aria-describedby=\"gallery-1-2073\" srcset=\"https:\/\/ftian.ru\/wp-content\/uploads\/2022\/01\/nauka-vajn-rezult841696469-300x276.jpg 300w, https:\/\/ftian.ru\/wp-content\/uploads\/2022\/01\/nauka-vajn-rezult841696469-1024x944.jpg 1024w, https:\/\/ftian.ru\/wp-content\/uploads\/2022\/01\/nauka-vajn-rezult841696469-768x708.jpg 768w, https:\/\/ftian.ru\/wp-content\/uploads\/2022\/01\/nauka-vajn-rezult841696469-1536x1415.jpg 1536w, https:\/\/ftian.ru\/wp-content\/uploads\/2022\/01\/nauka-vajn-rezult841696469-465x428.jpg 465w, https:\/\/ftian.ru\/wp-content\/uploads\/2022\/01\/nauka-vajn-rezult841696469-543x500.jpg 543w, https:\/\/ftian.ru\/wp-content\/uploads\/2022\/01\/nauka-vajn-rezult841696469.jpg 1600w\" sizes=\"auto, (max-width: 300px) 100vw, 300px\" title=\"Important results\" \/><\/a>\r\n\t\t\t<\/div>\r\n\t\t\t\t<figcaption class='wp-caption-text gallery-caption' id='gallery-1-2073'>\r\n\t\t\t\t\u0431\u0430\u0437\u043e\u0432\u0430\u044f \u043a\u043e\u043d\u0444\u0438\u0433\u0443\u0440\u0430\u0446\u0438\u044f \u0441 \u0434\u0432\u0443\u043c\u044f \u0432\u044b\u0445\u043e\u0434\u043d\u044b\u043c\u0438 \u043a\u0430\u043d\u0430\u043b\u0430\u043c\u0438 \u0438 \u0437\u0430\u0449\u0438\u0442\u043e\u0439 \u043e\u0442 \u0437\u0430\u043b\u0438\u043f\u0430\u043d\u0438\u044f\r\n\t\t\t\t<\/figcaption><\/figure><figure class='gallery-item'>\r\n\t\t\t<div class='gallery-icon landscape'>\r\n\t\t\t\t<a href='https:\/\/ftian.ru\/wp-content\/uploads\/2022\/01\/nauka-vajn-rezult3746169.jpg'><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"277\" src=\"https:\/\/ftian.ru\/wp-content\/uploads\/2022\/01\/nauka-vajn-rezult3746169-300x277.jpg\" class=\"attachment-medium size-medium\" alt=\"Important results\" aria-describedby=\"gallery-1-2072\" srcset=\"https:\/\/ftian.ru\/wp-content\/uploads\/2022\/01\/nauka-vajn-rezult3746169-300x277.jpg 300w, https:\/\/ftian.ru\/wp-content\/uploads\/2022\/01\/nauka-vajn-rezult3746169-465x429.jpg 465w, https:\/\/ftian.ru\/wp-content\/uploads\/2022\/01\/nauka-vajn-rezult3746169.jpg 538w\" sizes=\"auto, (max-width: 300px) 100vw, 300px\" title=\"Important results\" \/><\/a>\r\n\t\t\t<\/div>\r\n\t\t\t\t<figcaption class='wp-caption-text gallery-caption' id='gallery-1-2072'>\r\n\t\t\t\t\u043f\u0435\u0440\u0435\u043a\u043b\u044e\u0447\u0430\u0442\u0435\u043b\u044c \u0441 \u043d\u0435\u0441\u043a\u043e\u043b\u044c\u043a\u0438\u043c\u0438 \u0431\u0430\u043b\u043a\u0430\u043c\u0438\r\n\t\t\t\t<\/figcaption><\/figure><figure class='gallery-item'>\r\n\t\t\t<div class='gallery-icon landscape'>\r\n\t\t\t\t<a href='https:\/\/ftian.ru\/wp-content\/uploads\/2022\/01\/nauka-vajn-rezul8413169.jpg'><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"276\" src=\"https:\/\/ftian.ru\/wp-content\/uploads\/2022\/01\/nauka-vajn-rezul8413169-300x276.jpg\" class=\"attachment-medium size-medium\" alt=\"Important results\" aria-describedby=\"gallery-1-2071\" srcset=\"https:\/\/ftian.ru\/wp-content\/uploads\/2022\/01\/nauka-vajn-rezul8413169-300x276.jpg 300w, https:\/\/ftian.ru\/wp-content\/uploads\/2022\/01\/nauka-vajn-rezul8413169-1024x944.jpg 1024w, https:\/\/ftian.ru\/wp-content\/uploads\/2022\/01\/nauka-vajn-rezul8413169-768x708.jpg 768w, https:\/\/ftian.ru\/wp-content\/uploads\/2022\/01\/nauka-vajn-rezul8413169-1536x1415.jpg 1536w, https:\/\/ftian.ru\/wp-content\/uploads\/2022\/01\/nauka-vajn-rezul8413169-465x428.jpg 465w, https:\/\/ftian.ru\/wp-content\/uploads\/2022\/01\/nauka-vajn-rezul8413169-543x500.jpg 543w, https:\/\/ftian.ru\/wp-content\/uploads\/2022\/01\/nauka-vajn-rezul8413169.jpg 1600w\" sizes=\"auto, (max-width: 300px) 100vw, 300px\" title=\"Important results\" \/><\/a>\r\n\t\t\t<\/div>\r\n\t\t\t\t<figcaption class='wp-caption-text gallery-caption' id='gallery-1-2071'>\r\n\t\t\t\t\u043c\u043e\u0434\u0438\u0444\u0438\u0446\u0438\u0440\u043e\u0432\u0430\u043d\u043d\u044b\u0439 \u043f\u0435\u0440\u0435\u043a\u043b\u044e\u0447\u0430\u0442\u0435\u043b\u044c \u0441 \u0443\u0432\u0435\u043b\u0438\u0447\u0435\u043d\u043d\u043e\u0439 \u0441\u0438\u043b\u043e\u0439 \u043f\u0440\u0438\u0436\u0438\u043c\u0430 \u043a\u043e\u043d\u0442\u0430\u043a\u0442\u043e\u0432\r\n\t\t\t\t<\/figcaption><\/figure><\/div>\n\n<p>&nbsp;<\/p>\n<p style=\"text-align: center;\">\u0422\u0430\u0431\u043b\u0438\u0446\u0430. \u0420\u0430\u0431\u043e\u0447\u0438\u0435 \u0445\u0430\u0440\u0430\u043a\u0442\u0435\u0440\u0438\u0441\u0442\u0438\u043a\u0438 \u041c\u042d\u041c\u0421-\u043f\u0435\u0440\u0435\u043a\u043b\u044e\u0447\u0430\u0442\u0435\u043b\u044f.<\/p>\n<table>\n<tbody>\n<tr>\n<td width=\"227\">\n<p>\u041b\u0430\u0442\u0435\u0440\u0430\u043b\u044c\u043d\u044b\u0439 \u0440\u0430\u0437\u043c\u0435\u0440, \u043c\u043a\u043c<sup>2<\/sup><\/p>\n<\/td>\n<td width=\"95\">\n<p>100\u0445100<\/p>\n<\/td>\n<td width=\"238\">\n<p>\u041a\u043e\u043c\u043c\u0443\u0442\u0438\u0440\u0443\u0435\u043c\u0430\u044f \u043c\u043e\u0449\u043d\u043e\u0441\u0442\u044c, \u043c\u0412\u0442<\/p>\n<\/td>\n<td width=\"72\">\n<p>< 25<\/p>\n<\/td>\n<\/tr>\n<tr>\n<td width=\"227\">\n<p>\u0423\u043f\u0440\u0430\u0432\u043b\u044f\u044e\u0449\u0435\u0435 \u043d\u0430\u043f\u0440\u044f\u0436\u0435\u043d\u0438\u0435, \u0412<\/p>\n<\/td>\n<td width=\"95\">\n<p>12 &#8211; 45<\/p>\n<\/td>\n<td width=\"238\">\n<p>\u0414\u0438\u0430\u043f\u0430\u0437\u043e\u043d \u0447\u0430\u0441\u0442\u043e\u0442, \u0413\u0413\u0446<\/p>\n<\/td>\n<td width=\"72\">\n<p>0 &#8211; 6<\/p>\n<\/td>\n<\/tr>\n<tr>\n<td width=\"227\">\n<p>\u0412\u0440\u0435\u043c\u044f \u0441\u0440\u0430\u0431\u0430\u0442\u044b\u0432\u0430\u043d\u0438\u044f, \u043c\u043a\u0441<\/p>\n<\/td>\n<td width=\"95\">\n<p>15<\/p>\n<\/td>\n<td width=\"238\">\n<p>\u0427\u0438\u0441\u043b\u043e \u0446\u0438\u043a\u043b\u043e\u0432 \u043a\u043e\u043c\u043c\u0443\u0442\u0430\u0446\u0438\u0438<\/p>\n<\/td>\n<td width=\"72\">\n<p>> 5\u00d710<sup>4<\/sup><\/p>\n<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>&nbsp;<\/p>\n<ol>\n<li>\u0423\u0432\u0430\u0440\u043e\u0432 \u0418.\u0412., \u041c\u0430\u0440\u0443\u0445\u0438\u043d \u041d.\u0412., \u0428\u043b\u0435\u043f\u0430\u043a\u043e\u0432 \u041f.\u0421., \u041b\u0443\u043a\u0438\u0447\u0435\u0432 \u0412.\u0424. \u041c\u0438\u043a\u0440\u043e\u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u0438\u043a\u0430, 2020, \u0422\u043e\u043c 49, \u2116 4, \u0421. 271-280.<\/li>\n<li>Uvarov I.V., Selyukov R.V., Naumov V.V. Microsystem Technologies, 2020, Vol. 26, P.&nbsp;1971-1980.<\/li>\n<li>Uvarov I.V., Marukhin N.V., Naumov V.V. Microsystem Technologies, 2019, Vol. 25, P. 4135-4141.<\/li>\n<li>Uvarov I.V., Kupriyanov A.N. Microsystem Technologies, 2019, Vol. 25, P. 3243-3251.<\/li>\n<li>\u0423\u0432\u0430\u0440\u043e\u0432 \u0418.\u0412., \u041a\u0443\u043f\u0440\u0438\u044f\u043d\u043e\u0432 \u0410.\u041d. \u041c\u0438\u043a\u0440\u043e\u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u0438\u043a\u0430, 2018, \u0422\u043e\u043c 47, \u2116 5, \u0421. 30-37.<\/li>\n<li>Uvarov I.V., Naumov V.V., Koroleva O.M., Vaganova E.I., Amirov I.I. Proceedings of SPIE, 2016, Vol. 10224, 102241A.<\/li>\n<li>\u0423\u0432\u0430\u0440\u043e\u0432 \u0418.\u0412., \u041d\u0430\u0443\u043c\u043e\u0432 \u0412.\u0412., \u041a\u043e\u0440\u043e\u043b\u0435\u0432\u0430 \u041e.\u041c., \u0412\u0430\u0433\u0430\u043d\u043e\u0432\u0430 \u0415.\u0418., \u0410\u043c\u0438\u0440\u043e\u0432 \u0418.\u0418. \u041d\u0430\u043d\u043e- \u0438 \u043c\u0438\u043a\u0440\u043e\u0441\u0438\u0441\u0442\u0435\u043c\u043d\u0430\u044f \u0442\u0435\u0445\u043d\u0438\u043a\u0430, 2016, \u0422\u043e\u043c 18, \u2116 9, \u0421. 582-588.<\/li>\n<\/ol>\n","protected":false},"excerpt":{"rendered":"<p>\u0410\u0432\u0442\u043e\u0440\u044b: \u0418.\u0412. \u0423\u0432\u0430\u0440\u043e\u0432, \u0412.\u0412. \u041d\u0430\u0443\u043c\u043e\u0432, \u041e.\u041c. \u041a\u043e\u0440\u043e\u043b\u0435\u0432\u0430, \u0415.\u0418. \u0412\u0430\u0433\u0430\u043d\u043e\u0432\u0430, \u041c.\u041e. \u0418\u0437\u044e\u043c\u043e\u0432, \u0418.\u0418.&nbsp; \u0410\u043c\u0438\u0440\u043e\u0432 \u0420\u0430\u0437\u0440\u0430\u0431\u043e\u0442\u0430\u043d \u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043c\u0435\u0445\u0430\u043d\u0438\u0447\u0435\u0441\u043a\u0438\u0439 \u043f\u0435\u0440\u0435\u043a\u043b\u044e\u0447\u0430\u0442\u0435\u043b\u044c \u043c\u0438\u043a\u0440\u043e\u043d\u043d\u044b\u0445 \u0440\u0430\u0437\u043c\u0435\u0440\u043e\u0432. \u0418\u0437\u0434\u0435\u043b\u0438\u0435 \u043f\u0440\u0435\u0434\u0441\u0442\u0430\u0432\u043b\u044f\u0435\u0442 \u0441\u043e\u0431\u043e\u0439 \u043f\u043e\u0434\u0432\u0438\u0436\u043d\u0443\u044e \u043c\u0435\u0442\u0430\u043b\u043b\u0438\u0447\u0435\u0441\u043a\u0443\u044e \u0431\u0430\u043b\u043a\u0443, \u0440\u0430\u0441\u043f\u043e\u043b\u043e\u0436\u0435\u043d\u043d\u0443\u044e<span class=\"more-link\"><a href=\"https:\/\/ftian.ru\/en\/perekljuchatel-na-osnove-tehnologii-mikrojelektromehanicheskih-sistem-mjems\/\">\u041f\u043e\u0434\u0440\u043e\u0431\u043d\u0435\u0435<\/a><\/span><\/p>\n","protected":false},"author":1,"featured_media":2073,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"ngg_post_thumbnail":0,"footnotes":""},"categories":[24],"tags":[],"class_list":["entry","author-admin-ftian","post-2448","post","type-post","status-publish","format-standard","has-post-thumbnail","category-vazhnejshie-rezultaty"],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.9 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>\u041f\u0435\u0440\u0435\u043a\u043b\u044e\u0447\u0430\u0442\u0435\u043b\u044c \u043d\u0430 \u043e\u0441\u043d\u043e\u0432\u0435 \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0438 \u043c\u0438\u043a\u0440\u043e\u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043c\u0435\u0445\u0430\u043d\u0438\u0447\u0435\u0441\u043a\u0438\u0445 \u0441\u0438\u0441\u0442\u0435\u043c (\u041c\u042d\u041c\u0421)<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/ftian.ru\/en\/perekljuchatel-na-osnove-tehnologii-mikrojelektromehanicheskih-sistem-mjems\/\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:locale:alternate\" content=\"ru_RU\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"\u041f\u0435\u0440\u0435\u043a\u043b\u044e\u0447\u0430\u0442\u0435\u043b\u044c \u043d\u0430 \u043e\u0441\u043d\u043e\u0432\u0435 \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0438 \u043c\u0438\u043a\u0440\u043e\u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043c\u0435\u0445\u0430\u043d\u0438\u0447\u0435\u0441\u043a\u0438\u0445 \u0441\u0438\u0441\u0442\u0435\u043c (\u041c\u042d\u041c\u0421)\" \/>\n<meta property=\"og:description\" content=\"\u0410\u0432\u0442\u043e\u0440\u044b: \u0418.\u0412. \u0423\u0432\u0430\u0440\u043e\u0432, \u0412.\u0412. \u041d\u0430\u0443\u043c\u043e\u0432, \u041e.\u041c. \u041a\u043e\u0440\u043e\u043b\u0435\u0432\u0430, \u0415.\u0418. \u0412\u0430\u0433\u0430\u043d\u043e\u0432\u0430, \u041c.\u041e. \u0418\u0437\u044e\u043c\u043e\u0432, \u0418.\u0418.&nbsp; \u0410\u043c\u0438\u0440\u043e\u0432 \u0420\u0430\u0437\u0440\u0430\u0431\u043e\u0442\u0430\u043d \u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043c\u0435\u0445\u0430\u043d\u0438\u0447\u0435\u0441\u043a\u0438\u0439 \u043f\u0435\u0440\u0435\u043a\u043b\u044e\u0447\u0430\u0442\u0435\u043b\u044c \u043c\u0438\u043a\u0440\u043e\u043d\u043d\u044b\u0445 \u0440\u0430\u0437\u043c\u0435\u0440\u043e\u0432. \u0418\u0437\u0434\u0435\u043b\u0438\u0435 \u043f\u0440\u0435\u0434\u0441\u0442\u0430\u0432\u043b\u044f\u0435\u0442 \u0441\u043e\u0431\u043e\u0439 \u043f\u043e\u0434\u0432\u0438\u0436\u043d\u0443\u044e \u043c\u0435\u0442\u0430\u043b\u043b\u0438\u0447\u0435\u0441\u043a\u0443\u044e \u0431\u0430\u043b\u043a\u0443, \u0440\u0430\u0441\u043f\u043e\u043b\u043e\u0436\u0435\u043d\u043d\u0443\u044e\u041f\u043e\u0434\u0440\u043e\u0431\u043d\u0435\u0435\" \/>\n<meta property=\"og:url\" content=\"https:\/\/ftian.ru\/en\/perekljuchatel-na-osnove-tehnologii-mikrojelektromehanicheskih-sistem-mjems\/\" \/>\n<meta property=\"og:site_name\" content=\"\u0424\u0422\u0418\u0410\u041d\" \/>\n<meta property=\"article:published_time\" content=\"2020-02-18T13:32:02+00:00\" \/>\n<meta property=\"article:modified_time\" content=\"2022-02-18T13:38:14+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/ftian.ru\/wp-content\/uploads\/2022\/01\/nauka-vajn-rezult841696469.jpg\" \/>\n\t<meta property=\"og:image:width\" content=\"1600\" \/>\n\t<meta property=\"og:image:height\" content=\"1474\" \/>\n\t<meta property=\"og:image:type\" content=\"image\/jpeg\" \/>\n<meta name=\"author\" content=\"admin-ftian\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"Written by\" \/>\n\t<meta name=\"twitter:data1\" content=\"admin-ftian\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\\\/\\\/schema.org\",\"@graph\":[{\"@type\":\"Article\",\"@id\":\"https:\\\/\\\/ftian.ru\\\/perekljuchatel-na-osnove-tehnologii-mikrojelektromehanicheskih-sistem-mjems\\\/#article\",\"isPartOf\":{\"@id\":\"https:\\\/\\\/ftian.ru\\\/perekljuchatel-na-osnove-tehnologii-mikrojelektromehanicheskih-sistem-mjems\\\/\"},\"author\":{\"name\":\"admin-ftian\",\"@id\":\"https:\\\/\\\/ftian.ru\\\/#\\\/schema\\\/person\\\/62b39e1f941fb2283011015b9a6e0197\"},\"headline\":\"\u041f\u0435\u0440\u0435\u043a\u043b\u044e\u0447\u0430\u0442\u0435\u043b\u044c \u043d\u0430 \u043e\u0441\u043d\u043e\u0432\u0435 \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0438 \u043c\u0438\u043a\u0440\u043e\u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043c\u0435\u0445\u0430\u043d\u0438\u0447\u0435\u0441\u043a\u0438\u0445 \u0441\u0438\u0441\u0442\u0435\u043c (\u041c\u042d\u041c\u0421)\",\"datePublished\":\"2020-02-18T13:32:02+00:00\",\"dateModified\":\"2022-02-18T13:38:14+00:00\",\"mainEntityOfPage\":{\"@id\":\"https:\\\/\\\/ftian.ru\\\/perekljuchatel-na-osnove-tehnologii-mikrojelektromehanicheskih-sistem-mjems\\\/\"},\"wordCount\":275,\"commentCount\":0,\"publisher\":{\"@id\":\"https:\\\/\\\/ftian.ru\\\/#organization\"},\"image\":{\"@id\":\"https:\\\/\\\/ftian.ru\\\/perekljuchatel-na-osnove-tehnologii-mikrojelektromehanicheskih-sistem-mjems\\\/#primaryimage\"},\"thumbnailUrl\":\"https:\\\/\\\/ftian.ru\\\/wp-content\\\/uploads\\\/2022\\\/01\\\/nauka-vajn-rezult841696469.jpg\",\"articleSection\":[\"\u0412\u0430\u0436\u043d\u0435\u0439\u0448\u0438\u0435 \u0440\u0435\u0437\u0443\u043b\u044c\u0442\u0430\u0442\u044b\"],\"inLanguage\":\"en-US\",\"potentialAction\":[{\"@type\":\"CommentAction\",\"name\":\"Comment\",\"target\":[\"https:\\\/\\\/ftian.ru\\\/perekljuchatel-na-osnove-tehnologii-mikrojelektromehanicheskih-sistem-mjems\\\/#respond\"]}]},{\"@type\":\"WebPage\",\"@id\":\"https:\\\/\\\/ftian.ru\\\/perekljuchatel-na-osnove-tehnologii-mikrojelektromehanicheskih-sistem-mjems\\\/\",\"url\":\"https:\\\/\\\/ftian.ru\\\/perekljuchatel-na-osnove-tehnologii-mikrojelektromehanicheskih-sistem-mjems\\\/\",\"name\":\"\u041f\u0435\u0440\u0435\u043a\u043b\u044e\u0447\u0430\u0442\u0435\u043b\u044c \u043d\u0430 \u043e\u0441\u043d\u043e\u0432\u0435 \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0438 \u043c\u0438\u043a\u0440\u043e\u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043c\u0435\u0445\u0430\u043d\u0438\u0447\u0435\u0441\u043a\u0438\u0445 \u0441\u0438\u0441\u0442\u0435\u043c (\u041c\u042d\u041c\u0421)\",\"isPartOf\":{\"@id\":\"https:\\\/\\\/ftian.ru\\\/#website\"},\"primaryImageOfPage\":{\"@id\":\"https:\\\/\\\/ftian.ru\\\/perekljuchatel-na-osnove-tehnologii-mikrojelektromehanicheskih-sistem-mjems\\\/#primaryimage\"},\"image\":{\"@id\":\"https:\\\/\\\/ftian.ru\\\/perekljuchatel-na-osnove-tehnologii-mikrojelektromehanicheskih-sistem-mjems\\\/#primaryimage\"},\"thumbnailUrl\":\"https:\\\/\\\/ftian.ru\\\/wp-content\\\/uploads\\\/2022\\\/01\\\/nauka-vajn-rezult841696469.jpg\",\"datePublished\":\"2020-02-18T13:32:02+00:00\",\"dateModified\":\"2022-02-18T13:38:14+00:00\",\"breadcrumb\":{\"@id\":\"https:\\\/\\\/ftian.ru\\\/perekljuchatel-na-osnove-tehnologii-mikrojelektromehanicheskih-sistem-mjems\\\/#breadcrumb\"},\"inLanguage\":\"en-US\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\\\/\\\/ftian.ru\\\/perekljuchatel-na-osnove-tehnologii-mikrojelektromehanicheskih-sistem-mjems\\\/\"]}]},{\"@type\":\"ImageObject\",\"inLanguage\":\"en-US\",\"@id\":\"https:\\\/\\\/ftian.ru\\\/perekljuchatel-na-osnove-tehnologii-mikrojelektromehanicheskih-sistem-mjems\\\/#primaryimage\",\"url\":\"https:\\\/\\\/ftian.ru\\\/wp-content\\\/uploads\\\/2022\\\/01\\\/nauka-vajn-rezult841696469.jpg\",\"contentUrl\":\"https:\\\/\\\/ftian.ru\\\/wp-content\\\/uploads\\\/2022\\\/01\\\/nauka-vajn-rezult841696469.jpg\",\"width\":1600,\"height\":1474,\"caption\":\"\u0431\u0430\u0437\u043e\u0432\u0430\u044f \u043a\u043e\u043d\u0444\u0438\u0433\u0443\u0440\u0430\u0446\u0438\u044f \u0441 \u0434\u0432\u0443\u043c\u044f \u0432\u044b\u0445\u043e\u0434\u043d\u044b\u043c\u0438 \u043a\u0430\u043d\u0430\u043b\u0430\u043c\u0438 \u0438 \u0437\u0430\u0449\u0438\u0442\u043e\u0439 \u043e\u0442 \u0437\u0430\u043b\u0438\u043f\u0430\u043d\u0438\u044f\"},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\\\/\\\/ftian.ru\\\/perekljuchatel-na-osnove-tehnologii-mikrojelektromehanicheskih-sistem-mjems\\\/#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"\u0413\u043b\u0430\u0432\u043d\u0430\u044f \u0441\u0442\u0440\u0430\u043d\u0438\u0446\u0430\",\"item\":\"https:\\\/\\\/ftian.ru\\\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"\u041f\u0435\u0440\u0435\u043a\u043b\u044e\u0447\u0430\u0442\u0435\u043b\u044c \u043d\u0430 \u043e\u0441\u043d\u043e\u0432\u0435 \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0438 \u043c\u0438\u043a\u0440\u043e\u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043c\u0435\u0445\u0430\u043d\u0438\u0447\u0435\u0441\u043a\u0438\u0445 \u0441\u0438\u0441\u0442\u0435\u043c (\u041c\u042d\u041c\u0421)\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\\\/\\\/ftian.ru\\\/#website\",\"url\":\"https:\\\/\\\/ftian.ru\\\/\",\"name\":\"\u0424\u0422\u0418\u0410\u041d\",\"description\":\"\u0424\u0438\u0437\u0438\u043a\u043e-\u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0447\u0435\u0441\u043a\u0438\u0439 \u0438\u043d\u0441\u0442\u0438\u0442\u0443\u0442 \u0438\u043c. \u041a.\u0410. \u0412\u0430\u043b\u0438\u0435\u0432\u0430\",\"publisher\":{\"@id\":\"https:\\\/\\\/ftian.ru\\\/#organization\"},\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\\\/\\\/ftian.ru\\\/?s={search_term_string}\"},\"query-input\":{\"@type\":\"PropertyValueSpecification\",\"valueRequired\":true,\"valueName\":\"search_term_string\"}}],\"inLanguage\":\"en-US\"},{\"@type\":\"Organization\",\"@id\":\"https:\\\/\\\/ftian.ru\\\/#organization\",\"name\":\"\u0424\u0435\u0434\u0435\u0440\u0430\u043b\u044c\u043d\u043e\u0435 \u0433\u043e\u0441\u0443\u0434\u0430\u0440\u0441\u0442\u0432\u0435\u043d\u043d\u043e\u0435 \u0431\u044e\u0434\u0436\u0435\u0442\u043d\u043e\u0435 \u0443\u0447\u0440\u0435\u0436\u0434\u0435\u043d\u0438\u0435 \u043d\u0430\u0443\u043a\u0438 \u0424\u0438\u0437\u0438\u043a\u043e-\u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0447\u0435\u0441\u043a\u0438\u0439 \u0438\u043d\u0441\u0442\u0438\u0442\u0443\u0442 \u0438\u043c\u0435\u043d\u0438 \u041a.\u0410. \u0412\u0430\u043b\u0438\u0435\u0432\u0430 \u0420\u043e\u0441\u0441\u0438\u0439\u0441\u043a\u043e\u0439 \u0430\u043a\u0430\u0434\u0435\u043c\u0438\u0438 \u043d\u0430\u0443\u043a.\",\"url\":\"https:\\\/\\\/ftian.ru\\\/\",\"logo\":{\"@type\":\"ImageObject\",\"inLanguage\":\"en-US\",\"@id\":\"https:\\\/\\\/ftian.ru\\\/#\\\/schema\\\/logo\\\/image\\\/\",\"url\":\"http:\\\/\\\/ftian.ru\\\/wp-content\\\/uploads\\\/2022\\\/01\\\/logo-20-1.png\",\"contentUrl\":\"http:\\\/\\\/ftian.ru\\\/wp-content\\\/uploads\\\/2022\\\/01\\\/logo-20-1.png\",\"width\":500,\"height\":402,\"caption\":\"\u0424\u0435\u0434\u0435\u0440\u0430\u043b\u044c\u043d\u043e\u0435 \u0433\u043e\u0441\u0443\u0434\u0430\u0440\u0441\u0442\u0432\u0435\u043d\u043d\u043e\u0435 \u0431\u044e\u0434\u0436\u0435\u0442\u043d\u043e\u0435 \u0443\u0447\u0440\u0435\u0436\u0434\u0435\u043d\u0438\u0435 \u043d\u0430\u0443\u043a\u0438 \u0424\u0438\u0437\u0438\u043a\u043e-\u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0447\u0435\u0441\u043a\u0438\u0439 \u0438\u043d\u0441\u0442\u0438\u0442\u0443\u0442 \u0438\u043c\u0435\u043d\u0438 \u041a.\u0410. \u0412\u0430\u043b\u0438\u0435\u0432\u0430 \u0420\u043e\u0441\u0441\u0438\u0439\u0441\u043a\u043e\u0439 \u0430\u043a\u0430\u0434\u0435\u043c\u0438\u0438 \u043d\u0430\u0443\u043a.\"},\"image\":{\"@id\":\"https:\\\/\\\/ftian.ru\\\/#\\\/schema\\\/logo\\\/image\\\/\"}},{\"@type\":\"Person\",\"@id\":\"https:\\\/\\\/ftian.ru\\\/#\\\/schema\\\/person\\\/62b39e1f941fb2283011015b9a6e0197\",\"name\":\"admin-ftian\",\"image\":{\"@type\":\"ImageObject\",\"inLanguage\":\"en-US\",\"@id\":\"https:\\\/\\\/secure.gravatar.com\\\/avatar\\\/e9aa9be2b8019bc6b608a1ff0c4d27ea4d8465157f3b98e94954efff7e6febbe?s=96&d=mm&r=g\",\"url\":\"https:\\\/\\\/secure.gravatar.com\\\/avatar\\\/e9aa9be2b8019bc6b608a1ff0c4d27ea4d8465157f3b98e94954efff7e6febbe?s=96&d=mm&r=g\",\"contentUrl\":\"https:\\\/\\\/secure.gravatar.com\\\/avatar\\\/e9aa9be2b8019bc6b608a1ff0c4d27ea4d8465157f3b98e94954efff7e6febbe?s=96&d=mm&r=g\",\"caption\":\"admin-ftian\"},\"sameAs\":[\"http:\\\/\\\/ftian.ru\"],\"url\":\"https:\\\/\\\/ftian.ru\\\/en\\\/author\\\/admin-ftian\\\/\"}]}<\/script>\n<!-- \/ Yoast SEO plugin. -->","yoast_head_json":{"title":"\u041f\u0435\u0440\u0435\u043a\u043b\u044e\u0447\u0430\u0442\u0435\u043b\u044c \u043d\u0430 \u043e\u0441\u043d\u043e\u0432\u0435 \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0438 \u043c\u0438\u043a\u0440\u043e\u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043c\u0435\u0445\u0430\u043d\u0438\u0447\u0435\u0441\u043a\u0438\u0445 \u0441\u0438\u0441\u0442\u0435\u043c (\u041c\u042d\u041c\u0421)","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/ftian.ru\/en\/perekljuchatel-na-osnove-tehnologii-mikrojelektromehanicheskih-sistem-mjems\/","og_locale":"en_US","og_type":"article","og_title":"[:ru]\u041f\u0435\u0440\u0435\u043a\u043b\u044e\u0447\u0430\u0442\u0435\u043b\u044c \u043d\u0430 \u043e\u0441\u043d\u043e\u0432\u0435 \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0438 \u043c\u0438\u043a\u0440\u043e\u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043c\u0435\u0445\u0430\u043d\u0438\u0447\u0435\u0441\u043a\u0438\u0445 \u0441\u0438\u0441\u0442\u0435\u043c (\u041c\u042d\u041c\u0421)[:] - \u0424\u0422\u0418\u0410\u041d","og_description":"\u0410\u0432\u0442\u043e\u0440\u044b: \u0418.\u0412. \u0423\u0432\u0430\u0440\u043e\u0432, \u0412.\u0412. \u041d\u0430\u0443\u043c\u043e\u0432, \u041e.\u041c. \u041a\u043e\u0440\u043e\u043b\u0435\u0432\u0430, \u0415.\u0418. \u0412\u0430\u0433\u0430\u043d\u043e\u0432\u0430, \u041c.\u041e. \u0418\u0437\u044e\u043c\u043e\u0432, \u0418.\u0418.&nbsp; \u0410\u043c\u0438\u0440\u043e\u0432 \u0420\u0430\u0437\u0440\u0430\u0431\u043e\u0442\u0430\u043d \u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043c\u0435\u0445\u0430\u043d\u0438\u0447\u0435\u0441\u043a\u0438\u0439 \u043f\u0435\u0440\u0435\u043a\u043b\u044e\u0447\u0430\u0442\u0435\u043b\u044c \u043c\u0438\u043a\u0440\u043e\u043d\u043d\u044b\u0445 \u0440\u0430\u0437\u043c\u0435\u0440\u043e\u0432. \u0418\u0437\u0434\u0435\u043b\u0438\u0435 \u043f\u0440\u0435\u0434\u0441\u0442\u0430\u0432\u043b\u044f\u0435\u0442 \u0441\u043e\u0431\u043e\u0439 \u043f\u043e\u0434\u0432\u0438\u0436\u043d\u0443\u044e \u043c\u0435\u0442\u0430\u043b\u043b\u0438\u0447\u0435\u0441\u043a\u0443\u044e \u0431\u0430\u043b\u043a\u0443, \u0440\u0430\u0441\u043f\u043e\u043b\u043e\u0436\u0435\u043d\u043d\u0443\u044e\u041f\u043e\u0434\u0440\u043e\u0431\u043d\u0435\u0435","og_url":"https:\/\/ftian.ru\/en\/perekljuchatel-na-osnove-tehnologii-mikrojelektromehanicheskih-sistem-mjems\/","og_site_name":"\u0424\u0422\u0418\u0410\u041d","article_published_time":"2020-02-18T13:32:02+00:00","article_modified_time":"2022-02-18T13:38:14+00:00","og_image":[{"width":1600,"height":1474,"url":"https:\/\/ftian.ru\/wp-content\/uploads\/2022\/01\/nauka-vajn-rezult841696469.jpg","type":"image\/jpeg"}],"author":"admin-ftian","twitter_card":"summary_large_image","twitter_misc":{"Written by":"admin-ftian"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"Article","@id":"https:\/\/ftian.ru\/perekljuchatel-na-osnove-tehnologii-mikrojelektromehanicheskih-sistem-mjems\/#article","isPartOf":{"@id":"https:\/\/ftian.ru\/perekljuchatel-na-osnove-tehnologii-mikrojelektromehanicheskih-sistem-mjems\/"},"author":{"name":"admin-ftian","@id":"https:\/\/ftian.ru\/#\/schema\/person\/62b39e1f941fb2283011015b9a6e0197"},"headline":"\u041f\u0435\u0440\u0435\u043a\u043b\u044e\u0447\u0430\u0442\u0435\u043b\u044c \u043d\u0430 \u043e\u0441\u043d\u043e\u0432\u0435 \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0438 \u043c\u0438\u043a\u0440\u043e\u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043c\u0435\u0445\u0430\u043d\u0438\u0447\u0435\u0441\u043a\u0438\u0445 \u0441\u0438\u0441\u0442\u0435\u043c (\u041c\u042d\u041c\u0421)","datePublished":"2020-02-18T13:32:02+00:00","dateModified":"2022-02-18T13:38:14+00:00","mainEntityOfPage":{"@id":"https:\/\/ftian.ru\/perekljuchatel-na-osnove-tehnologii-mikrojelektromehanicheskih-sistem-mjems\/"},"wordCount":275,"commentCount":0,"publisher":{"@id":"https:\/\/ftian.ru\/#organization"},"image":{"@id":"https:\/\/ftian.ru\/perekljuchatel-na-osnove-tehnologii-mikrojelektromehanicheskih-sistem-mjems\/#primaryimage"},"thumbnailUrl":"https:\/\/ftian.ru\/wp-content\/uploads\/2022\/01\/nauka-vajn-rezult841696469.jpg","articleSection":["\u0412\u0430\u0436\u043d\u0435\u0439\u0448\u0438\u0435 \u0440\u0435\u0437\u0443\u043b\u044c\u0442\u0430\u0442\u044b"],"inLanguage":"en-US","potentialAction":[{"@type":"CommentAction","name":"Comment","target":["https:\/\/ftian.ru\/perekljuchatel-na-osnove-tehnologii-mikrojelektromehanicheskih-sistem-mjems\/#respond"]}]},{"@type":"WebPage","@id":"https:\/\/ftian.ru\/perekljuchatel-na-osnove-tehnologii-mikrojelektromehanicheskih-sistem-mjems\/","url":"https:\/\/ftian.ru\/perekljuchatel-na-osnove-tehnologii-mikrojelektromehanicheskih-sistem-mjems\/","name":"\u041f\u0435\u0440\u0435\u043a\u043b\u044e\u0447\u0430\u0442\u0435\u043b\u044c \u043d\u0430 \u043e\u0441\u043d\u043e\u0432\u0435 \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0438 \u043c\u0438\u043a\u0440\u043e\u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043c\u0435\u0445\u0430\u043d\u0438\u0447\u0435\u0441\u043a\u0438\u0445 \u0441\u0438\u0441\u0442\u0435\u043c (\u041c\u042d\u041c\u0421)","isPartOf":{"@id":"https:\/\/ftian.ru\/#website"},"primaryImageOfPage":{"@id":"https:\/\/ftian.ru\/perekljuchatel-na-osnove-tehnologii-mikrojelektromehanicheskih-sistem-mjems\/#primaryimage"},"image":{"@id":"https:\/\/ftian.ru\/perekljuchatel-na-osnove-tehnologii-mikrojelektromehanicheskih-sistem-mjems\/#primaryimage"},"thumbnailUrl":"https:\/\/ftian.ru\/wp-content\/uploads\/2022\/01\/nauka-vajn-rezult841696469.jpg","datePublished":"2020-02-18T13:32:02+00:00","dateModified":"2022-02-18T13:38:14+00:00","breadcrumb":{"@id":"https:\/\/ftian.ru\/perekljuchatel-na-osnove-tehnologii-mikrojelektromehanicheskih-sistem-mjems\/#breadcrumb"},"inLanguage":"en-US","potentialAction":[{"@type":"ReadAction","target":["https:\/\/ftian.ru\/perekljuchatel-na-osnove-tehnologii-mikrojelektromehanicheskih-sistem-mjems\/"]}]},{"@type":"ImageObject","inLanguage":"en-US","@id":"https:\/\/ftian.ru\/perekljuchatel-na-osnove-tehnologii-mikrojelektromehanicheskih-sistem-mjems\/#primaryimage","url":"https:\/\/ftian.ru\/wp-content\/uploads\/2022\/01\/nauka-vajn-rezult841696469.jpg","contentUrl":"https:\/\/ftian.ru\/wp-content\/uploads\/2022\/01\/nauka-vajn-rezult841696469.jpg","width":1600,"height":1474,"caption":"\u0431\u0430\u0437\u043e\u0432\u0430\u044f \u043a\u043e\u043d\u0444\u0438\u0433\u0443\u0440\u0430\u0446\u0438\u044f \u0441 \u0434\u0432\u0443\u043c\u044f \u0432\u044b\u0445\u043e\u0434\u043d\u044b\u043c\u0438 \u043a\u0430\u043d\u0430\u043b\u0430\u043c\u0438 \u0438 \u0437\u0430\u0449\u0438\u0442\u043e\u0439 \u043e\u0442 \u0437\u0430\u043b\u0438\u043f\u0430\u043d\u0438\u044f"},{"@type":"BreadcrumbList","@id":"https:\/\/ftian.ru\/perekljuchatel-na-osnove-tehnologii-mikrojelektromehanicheskih-sistem-mjems\/#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"\u0413\u043b\u0430\u0432\u043d\u0430\u044f \u0441\u0442\u0440\u0430\u043d\u0438\u0446\u0430","item":"https:\/\/ftian.ru\/"},{"@type":"ListItem","position":2,"name":"\u041f\u0435\u0440\u0435\u043a\u043b\u044e\u0447\u0430\u0442\u0435\u043b\u044c \u043d\u0430 \u043e\u0441\u043d\u043e\u0432\u0435 \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0438 \u043c\u0438\u043a\u0440\u043e\u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043c\u0435\u0445\u0430\u043d\u0438\u0447\u0435\u0441\u043a\u0438\u0445 \u0441\u0438\u0441\u0442\u0435\u043c (\u041c\u042d\u041c\u0421)"}]},{"@type":"WebSite","@id":"https:\/\/ftian.ru\/#website","url":"https:\/\/ftian.ru\/","name":"\u0424\u0422\u0418\u0410\u041d","description":"\u0424\u0438\u0437\u0438\u043a\u043e-\u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0447\u0435\u0441\u043a\u0438\u0439 \u0438\u043d\u0441\u0442\u0438\u0442\u0443\u0442 \u0438\u043c. \u041a.\u0410. \u0412\u0430\u043b\u0438\u0435\u0432\u0430","publisher":{"@id":"https:\/\/ftian.ru\/#organization"},"potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/ftian.ru\/?s={search_term_string}"},"query-input":{"@type":"PropertyValueSpecification","valueRequired":true,"valueName":"search_term_string"}}],"inLanguage":"en-US"},{"@type":"Organization","@id":"https:\/\/ftian.ru\/#organization","name":"\u0424\u0435\u0434\u0435\u0440\u0430\u043b\u044c\u043d\u043e\u0435 \u0433\u043e\u0441\u0443\u0434\u0430\u0440\u0441\u0442\u0432\u0435\u043d\u043d\u043e\u0435 \u0431\u044e\u0434\u0436\u0435\u0442\u043d\u043e\u0435 \u0443\u0447\u0440\u0435\u0436\u0434\u0435\u043d\u0438\u0435 \u043d\u0430\u0443\u043a\u0438 \u0424\u0438\u0437\u0438\u043a\u043e-\u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0447\u0435\u0441\u043a\u0438\u0439 \u0438\u043d\u0441\u0442\u0438\u0442\u0443\u0442 \u0438\u043c\u0435\u043d\u0438 \u041a.\u0410. \u0412\u0430\u043b\u0438\u0435\u0432\u0430 \u0420\u043e\u0441\u0441\u0438\u0439\u0441\u043a\u043e\u0439 \u0430\u043a\u0430\u0434\u0435\u043c\u0438\u0438 \u043d\u0430\u0443\u043a.","url":"https:\/\/ftian.ru\/","logo":{"@type":"ImageObject","inLanguage":"en-US","@id":"https:\/\/ftian.ru\/#\/schema\/logo\/image\/","url":"http:\/\/ftian.ru\/wp-content\/uploads\/2022\/01\/logo-20-1.png","contentUrl":"http:\/\/ftian.ru\/wp-content\/uploads\/2022\/01\/logo-20-1.png","width":500,"height":402,"caption":"\u0424\u0435\u0434\u0435\u0440\u0430\u043b\u044c\u043d\u043e\u0435 \u0433\u043e\u0441\u0443\u0434\u0430\u0440\u0441\u0442\u0432\u0435\u043d\u043d\u043e\u0435 \u0431\u044e\u0434\u0436\u0435\u0442\u043d\u043e\u0435 \u0443\u0447\u0440\u0435\u0436\u0434\u0435\u043d\u0438\u0435 \u043d\u0430\u0443\u043a\u0438 \u0424\u0438\u0437\u0438\u043a\u043e-\u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0447\u0435\u0441\u043a\u0438\u0439 \u0438\u043d\u0441\u0442\u0438\u0442\u0443\u0442 \u0438\u043c\u0435\u043d\u0438 \u041a.\u0410. \u0412\u0430\u043b\u0438\u0435\u0432\u0430 \u0420\u043e\u0441\u0441\u0438\u0439\u0441\u043a\u043e\u0439 \u0430\u043a\u0430\u0434\u0435\u043c\u0438\u0438 \u043d\u0430\u0443\u043a."},"image":{"@id":"https:\/\/ftian.ru\/#\/schema\/logo\/image\/"}},{"@type":"Person","@id":"https:\/\/ftian.ru\/#\/schema\/person\/62b39e1f941fb2283011015b9a6e0197","name":"admin-ftian","image":{"@type":"ImageObject","inLanguage":"en-US","@id":"https:\/\/secure.gravatar.com\/avatar\/e9aa9be2b8019bc6b608a1ff0c4d27ea4d8465157f3b98e94954efff7e6febbe?s=96&d=mm&r=g","url":"https:\/\/secure.gravatar.com\/avatar\/e9aa9be2b8019bc6b608a1ff0c4d27ea4d8465157f3b98e94954efff7e6febbe?s=96&d=mm&r=g","contentUrl":"https:\/\/secure.gravatar.com\/avatar\/e9aa9be2b8019bc6b608a1ff0c4d27ea4d8465157f3b98e94954efff7e6febbe?s=96&d=mm&r=g","caption":"admin-ftian"},"sameAs":["http:\/\/ftian.ru"],"url":"https:\/\/ftian.ru\/en\/author\/admin-ftian\/"}]}},"_links":{"self":[{"href":"https:\/\/ftian.ru\/en\/wp-json\/wp\/v2\/posts\/2448","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/ftian.ru\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/ftian.ru\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/ftian.ru\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/ftian.ru\/en\/wp-json\/wp\/v2\/comments?post=2448"}],"version-history":[{"count":1,"href":"https:\/\/ftian.ru\/en\/wp-json\/wp\/v2\/posts\/2448\/revisions"}],"predecessor-version":[{"id":2449,"href":"https:\/\/ftian.ru\/en\/wp-json\/wp\/v2\/posts\/2448\/revisions\/2449"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/ftian.ru\/en\/wp-json\/wp\/v2\/media\/2073"}],"wp:attachment":[{"href":"https:\/\/ftian.ru\/en\/wp-json\/wp\/v2\/media?parent=2448"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/ftian.ru\/en\/wp-json\/wp\/v2\/categories?post=2448"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/ftian.ru\/en\/wp-json\/wp\/v2\/tags?post=2448"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}