{"id":3116,"date":"2023-03-26T13:00:56","date_gmt":"2023-03-26T13:00:56","guid":{"rendered":"https:\/\/ftian.ru\/?page_id=3116"},"modified":"2023-03-26T13:00:56","modified_gmt":"2023-03-26T13:00:56","slug":"sidorov-fedor-alekseevich-m-n-s","status":"publish","type":"page","link":"https:\/\/ftian.ru\/en\/institut\/laboratorii\/laboratorija-tehnologij-jelektronnoj-i-opticheskoj-litografii\/sidorov-fedor-alekseevich-m-n-s\/","title":{"rendered":"\u0421\u0438\u0434\u043e\u0440\u043e\u0432 \u0424\u0435\u0434\u043e\u0440 \u0410\u043b\u0435\u043a\u0441\u0435\u0435\u0432\u0438\u0447, \u043c.\u043d.\u0441."},"content":{"rendered":"<p style=\"text-align: left;\"><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-3101 alignleft\" src=\"http:\/\/ftian.ru\/wp-content\/uploads\/2023\/03\/Sidorov.png\" alt=\"\u0421\u0438\u0434\u043e\u0440\u043e\u0432 \u0424\u0435\u0434\u043e\u0440 \u0410\u043b\u0435\u043a\u0441\u0435\u0435\u0432\u0438\u0447, \u043c.\u043d.\u0441.\" width=\"200\" height=\"280\" \/><\/p>\n<p><strong><b>\u0424\u0435\u0434\u043e\u0440 \u0421\u0438\u0434\u043e\u0440\u043e\u0432 (01.10.1992)<\/b><\/strong><\/p>\n<p><a class=\"mail-Abook-Person-List-Item_link\" tabindex=\"-1\" href=\"https:\/\/mail.yandex.ru\/?uid=1130000060644784#compose?to=%3Csidorov%40ftian.ru%3E\">sidorov@ftian.ru<\/a><\/p>\n<p>&nbsp;<\/p>\n<p>&nbsp;<\/p>\n<p>&nbsp;<\/p>\n<p>&nbsp;<\/p>\n<p>&nbsp;<\/p>\n<p>&nbsp;<\/p>\n<p><strong><b>\u041e\u0431\u0440\u0430\u0437\u043e\u0432\u0430\u043d\u0438\u0435:<\/b><\/strong><\/p>\n<p>\u041e\u043a\u043e\u043d\u0447\u0438\u043b \u041c\u043e\u0441\u043a\u043e\u0432\u0441\u043a\u0438\u0439 \u0444\u0438\u0437\u0438\u043a\u043e-\u0442\u0435\u0445\u043d\u0438\u0447\u0435\u0441\u043a\u0438\u0439 \u0438\u043d\u0441\u0442\u0438\u0442\u0443\u0442 (\u041d\u0418\u0423):<\/p>\n<ul>\n<li>2014 \u0433. \u2013 \u0431\u0430\u043a\u0430\u043b\u0430\u0432\u0440\u0438\u0430\u0442 (\u0424\u0430\u043a\u0443\u043b\u044c\u0442\u0435\u0442 \u043e\u0431\u0449\u0435\u0439 \u0438 \u043f\u0440\u0438\u043a\u043b\u0430\u0434\u043d\u043e\u0439 \u0444\u0438\u0437\u0438\u043a\u0438)<\/li>\n<li>2016 \u0433. \u2013 \u043c\u0430\u0433\u0438\u0441\u0442\u0440\u0430\u0442\u0443\u0440\u0430 (\u0424\u0430\u043a\u0443\u043b\u044c\u0442\u0435\u0442 \u0444\u0438\u0437\u0438\u0447\u0435\u0441\u043a\u043e\u0439 \u0438 \u043a\u0432\u0430\u043d\u0442\u043e\u0432\u043e\u0439 \u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u0438\u043a\u0438)<\/li>\n<li>2020 \u0433. \u2013 \u0430\u0441\u043f\u0438\u0440\u0430\u043d\u0442\u0443\u0440\u0430 (\u0424\u0438\u0437\u0442\u0435\u0445-\u0448\u043a\u043e\u043b\u0430 \u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u0438\u043a\u0438, \u0444\u043e\u0442\u043e\u043d\u0438\u043a\u0438 \u0438 \u043c\u043e\u043b\u0435\u043a\u0443\u043b\u044f\u0440\u043d\u043e\u0439 \u0444\u0438\u0437\u0438\u043a\u0438)<\/li>\n<\/ul>\n<p>\u041a\u0432\u0430\u043b\u0438\u0444\u0438\u043a\u0430\u0446\u0438\u044f \u2013 \u0438\u0441\u0441\u043b\u0435\u0434\u043e\u0432\u0430\u0442\u0435\u043b\u044c; \u043f\u0440\u0435\u043f\u043e\u0434\u0430\u0432\u0430\u0442\u0435\u043b\u044c-\u0438\u0441\u0441\u043b\u0435\u0434\u043e\u0432\u0430\u0442\u0435\u043b\u044c.<\/p>\n<p>&nbsp;<\/p>\n<p><strong><b>\u041a\u0430\u0440\u044c\u0435\u0440\u0430:<\/b><\/strong><\/p>\n<p>2015\u20132020 \u0433.: \u0438\u043d\u0436\u0435\u043d\u0435\u0440 \u0432 \u041a.\u0410. \u0412\u0430\u043b\u0438\u0435\u0432\u0430 \u0420\u0410\u041d (\u0424\u0422\u0418\u0410\u041d \u0438\u043c. \u041a.\u0410. \u0412\u0430\u043b\u0438\u0435\u0432\u0430);<\/p>\n<p>2020\u2013\u043d. \u0432.: \u043c. \u043d. \u0441. \u0432 \u041a.\u0410. \u0412\u0430\u043b\u0438\u0435\u0432\u0430 \u0420\u0410\u041d (\u0424\u0422\u0418\u0410\u041d \u0438\u043c. \u041a.\u0410. \u0412\u0430\u043b\u0438\u0435\u0432\u0430);<\/p>\n<p>&nbsp;<\/p>\n<p><strong><b>\u041d\u0430\u0443\u0447\u043d\u044b\u0435 \u0438\u043d\u0442\u0435\u0440\u0435\u0441\u044b:<\/b><\/strong><\/p>\n<p>\u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u043d\u043e-\u043b\u0443\u0447\u0435\u0432\u0430\u044f \u043b\u0438\u0442\u043e\u0433\u0440\u0430\u0444\u0438\u044f, \u0441\u0443\u0445\u043e\u0435 \u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u043d\u043e-\u043b\u0443\u0447\u0435\u0432\u043e\u0435 \u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u0435 \u0440\u0435\u0437\u0438\u0441\u0442\u0430, \u0442\u0435\u0440\u043c\u0438\u0447\u0435\u0441\u043a\u0430\u044f \u0434\u0435\u043f\u043e\u043b\u0438\u043c\u0435\u0440\u0438\u0437\u0430\u0446\u0438\u044f, \u043c\u0430\u0442\u0435\u043c\u0430\u0442\u0438\u0447\u0435\u0441\u043a\u043e\u0435 \u043c\u043e\u0434\u0435\u043b\u0438\u0440\u043e\u0432\u0430\u043d\u0438\u0435 \u0432\u0437\u0430\u0438\u043c\u043e\u0434\u0435\u0439\u0441\u0442\u0432\u0438\u044f \u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u043d\u043e\u0433\u043e \u043b\u0443\u0447\u0430 \u0441 \u0432\u0435\u0449\u0435\u0441\u0442\u0432\u043e\u043c<\/p>\n<p>&nbsp;<\/p>\n<p><strong><b>\u041e\u0441\u043d\u043e\u0432\u043d\u044b\u0435 \u043f\u0443\u0431\u043b\u0438\u043a\u0430\u0446\u0438\u0438 \u043f\u043e \u0442\u0435\u043c\u0430\u043c \u0438\u0441\u0441\u043b\u0435\u0434\u043e\u0432\u0430\u043d\u0438\u0439:<\/b><\/strong><\/p>\n<ol>\n<li>Nanophotonic structure formation by dry e-beam etching of the resist: resolution limitation origins \/ A. Rogozhin, M. Bruk, E. Zhikharev, F. Sidorov \/\/ Computer Optics. \u2014 2017. \u2014 \u0442. 41, \u2116 4. \u2014 \u0441. 499\u2014503.<\/li>\n<li>Fabrication of microlens arrays and planar photonic crystals using thermal amplification of resist \/ F. Sidorov, M. Bruk, E. Zhikharev, A. Rogozhin. 2018.<\/li>\n<li>Simulation of dry e-beam etching of resist and experimental evidence \/ A. Rogozhin, F. Sidorov, M. Bruk, E. Zhikharev. \u2014 2019.<\/li>\n<li>Sidorov F., Rogozhin A. Detailed Monte-Carlo simulation of PMMA chain scissions in e-beam lithography. \u2014 2019.<\/li>\n<li>Rogozhin A., Sidorov F. E-beam lithography simulation techniques \/\/ Russian Microelectronics. \u2014 2020. \u2014 \u0442. 49, \u2116 2. \u2014 \u0441. 108\u2014122.<\/li>\n<li>Direct Monte-Carlo simulation of dry e-beam etching of resist \/ F. Sidorov, A. Rogozhin, M. Bruk, E. Zhikharev \/\/ Microelectronic Engineering. \u2014 2020. \u0442. 227. \u2014 \u0441. 111313.<\/li>\n<li>Sidorov F., Rogozhin A. Microscopic simulation of e-beam induced PMMA chain scissions with temperature effect. \u2014 2020.<\/li>\n<li>Sidorov F., Rogozhin A. New microscopic approach to e-beam lithography simulation. \u2014 2020.<\/li>\n<li>Isaev A., Sidorov F., Rogozhin A. Influence of Resist Spreading during Its Dry Electron-Beam Etching on a Lateral Resolution \/\/ Russian Microelectronics. \u2014 \u0442. 50, \u2116 1. \u2014 \u0441. 19\u201423.<\/li>\n<\/ol>\n","protected":false},"excerpt":{"rendered":"<p>\u0424\u0435\u0434\u043e\u0440 \u0421\u0438\u0434\u043e\u0440\u043e\u0432 (01.10.1992) sidorov@ftian.ru &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; \u041e\u0431\u0440\u0430\u0437\u043e\u0432\u0430\u043d\u0438\u0435: \u041e\u043a\u043e\u043d\u0447\u0438\u043b \u041c\u043e\u0441\u043a\u043e\u0432\u0441\u043a\u0438\u0439 \u0444\u0438\u0437\u0438\u043a\u043e-\u0442\u0435\u0445\u043d\u0438\u0447\u0435\u0441\u043a\u0438\u0439 \u0438\u043d\u0441\u0442\u0438\u0442\u0443\u0442 (\u041d\u0418\u0423): 2014 \u0433. \u2013 \u0431\u0430\u043a\u0430\u043b\u0430\u0432\u0440\u0438\u0430\u0442 (\u0424\u0430\u043a\u0443\u043b\u044c\u0442\u0435\u0442 \u043e\u0431\u0449\u0435\u0439 \u0438 \u043f\u0440\u0438\u043a\u043b\u0430\u0434\u043d\u043e\u0439 \u0444\u0438\u0437\u0438\u043a\u0438)<span class=\"more-link\"><a href=\"https:\/\/ftian.ru\/en\/institut\/laboratorii\/laboratorija-tehnologij-jelektronnoj-i-opticheskoj-litografii\/sidorov-fedor-alekseevich-m-n-s\/\">\u041f\u043e\u0434\u0440\u043e\u0431\u043d\u0435\u0435<\/a><\/span><\/p>\n","protected":false},"author":3,"featured_media":0,"parent":3003,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"ngg_post_thumbnail":0,"footnotes":""},"class_list":["entry","author-redactor1","post-3116","page","type-page","status-publish"],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.9 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>\u0421\u0438\u0434\u043e\u0440\u043e\u0432 \u0424\u0435\u0434\u043e\u0440 \u0410\u043b\u0435\u043a\u0441\u0435\u0435\u0432\u0438\u0447, \u043c.\u043d.\u0441.<\/title>\n<meta name=\"description\" content=\"\u0421\u0438\u0434\u043e\u0440\u043e\u0432 \u0424\u0435\u0434\u043e\u0440 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