{"id":3003,"date":"2023-01-19T09:42:01","date_gmt":"2023-01-19T09:42:01","guid":{"rendered":"http:\/\/ftian.ru\/?page_id=3003"},"modified":"2023-03-27T10:31:26","modified_gmt":"2023-03-27T10:31:26","slug":"laboratorija-tehnologij-jelektronnoj-i-opticheskoj-litografii","status":"publish","type":"page","link":"https:\/\/ftian.ru\/en\/institut\/laboratorii\/laboratorija-tehnologij-jelektronnoj-i-opticheskoj-litografii\/","title":{"rendered":"\u041b\u0430\u0431\u043e\u0440\u0430\u0442\u043e\u0440\u0438\u044f \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0439 \u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u043d\u043e\u0439 \u0438 \u043e\u043f\u0442\u0438\u0447\u0435\u0441\u043a\u043e\u0439 \u043b\u0438\u0442\u043e\u0433\u0440\u0430\u0444\u0438\u0438"},"content":{"rendered":"

\u0420\u0443\u043a\u043e\u0432\u043e\u0434\u0438\u0442\u0435\u043b\u044c \u043b\u0430\u0431\u043e\u0440\u0430\u0442\u043e\u0440\u0438\u0438 \u2014 \u0441.\u043d.\u0441., \u043a.\u0444-\u043c.\u043d. \u0420\u043e\u0433\u043e\u0436\u0438\u043d \u0410.\u0415.<\/a><\/p>\n

rogozhin@ftian.ru<\/p>\n

\u041e\u0441\u043d\u043e\u0432\u043d\u044b\u0435 \u043d\u0430\u043f\u0440\u0432\u043b\u0435\u043d\u0438\u044f \u0438\u0441\u0441\u043b\u0435\u0434\u043e\u0432\u0430\u043d\u0438\u044f<\/strong><\/p>\n

    \n
  1. \u0420\u0430\u0437\u0440\u0430\u0431\u043e\u0442\u043a\u0430 \u043d\u043e\u0432\u044b\u0445 \u0440\u0435\u0437\u0438\u0441\u0442\u043e\u0432 \u0438 \u0445\u0430\u0440\u0430\u043a\u0442\u0435\u0440\u0438\u0437\u0430\u0446\u0438\u044f \u0434\u043e\u0441\u0442\u0443\u043f\u043d\u044b\u0445 \u0440\u0435\u0437\u0438\u0441\u0442\u043e\u0432 \u0432 \u0438\u043d\u0442\u0435\u0440\u0435\u0441\u0430\u0445 \u043c\u0438\u043a\u0440\u043e\u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u043d\u043e\u0439 \u043f\u0440\u043e\u043c\u044b\u0448\u043b\u0435\u043d\u043d\u043e\u0441\u0442\u0438 \u0420\u0424<\/li>\n
  2. \u0421\u043e\u0437\u0434\u0430\u043d\u0438\u0435 \u0431\u0430\u0437\u044b \u0434\u0430\u043d\u043d\u044b\u0445 \u043f\u0440\u043e\u0438\u0437\u0432\u043e\u0434\u0438\u0442\u0435\u043b\u0435\u0439 \u0440\u0435\u0437\u0438\u0441\u0442\u043e\u0432<\/li>\n
  3. \u041e\u043f\u0442\u0438\u043c\u0438\u0437\u0430\u0446\u0438\u044f \u043b\u0438\u0442\u043e\u0433\u0440\u0430\u0444\u0438\u0447\u0435\u0441\u043a\u0438\u0445 \u043f\u0440\u043e\u0446\u0435\u0441\u0441\u043e\u0432 \u0432\u043e \u0424\u0422\u0418\u0410\u041d \u0438\u043c. \u041a.\u0410. \u0412\u0430\u043b\u0438\u0435\u0432\u0430 \u0420\u0410\u041d<\/li>\n<\/ol>\n

    \u0421\u043e\u0442\u0440\u0443\u0434\u043d\u0438\u043a\u0438 \u043b\u0430\u0431\u043e\u0440\u0430\u0442\u043e\u0440\u0438\u0438<\/strong><\/p>\n

    \u0422\u0430\u0442\u0430\u0440\u0438\u043d\u0446\u0435\u0432 \u0410\u043d\u0434\u0440\u0435\u0439 \u0410\u043d\u0434\u0440\u0435\u0435\u0432\u0438\u0447, \u043a.\u0444.-\u043c.\u043d., \u0441.\u043d.\u0441.<\/a><\/div>\n
    \u0428\u0438\u0448\u043b\u044f\u043d\u043d\u0438\u043a\u043e\u0432 \u0410\u043d\u0442\u043e\u043d \u0412\u0430\u043b\u0435\u0440\u044c\u0435\u0432\u0438\u0447, \u043a.\u0444.-\u043c.\u043d., \u0432\u0435\u0434\u0443\u0449\u0438\u0439 \u0438\u043d\u0436\u0435\u043d\u0435\u0440<\/div>\n
    \u0411\u0430\u0431\u0443\u0448\u043a\u0438\u043d \u0410\u0440\u0442\u0435\u043c \u0421\u0435\u0440\u0433\u0435\u0435\u0432\u0438\u0447, \u043d.\u0441.<\/a><\/div>\n
    \u0421\u0438\u0434\u043e\u0440\u043e\u0432 \u0424\u0435\u0434\u043e\u0440 \u0410\u043b\u0435\u043a\u0441\u0435\u0435\u0432\u0438\u0447, \u043c.\u043d.\u0441.<\/a><\/div>\n
    \u0428\u043b\u0435\u043f\u0430\u043a\u043e\u0432 \u041f\u0430\u0432\u0435\u043b \u0421\u0435\u0440\u0433\u0435\u0435\u0432\u0438\u0447, \u043c.\u043d.\u0441.<\/a><\/div>\n
    \u0418\u0441\u0430\u0435\u0432 \u0410\u043b\u0435\u043a\u0441\u0430\u043d\u0434\u0440 \u0413\u0435\u043d\u043d\u0430\u0434\u044c\u0435\u0432\u0438\u0447, \u043c.\u043d.\u0441.<\/div>\n
    \u0424\u0435\u0442\u0438\u0441\u0435\u043d\u043a\u043e\u0432\u0430 \u041a\u0441\u0435\u043d\u0438\u044f \u0410\u043b\u0435\u043a\u0441\u0435\u0435\u0432\u043d\u0430, \u0438\u043d\u0436\u0435\u043d\u0435\u0440, \u0441\u0442\u0443\u0434\u0435\u043d\u0442\u043a\u0430 \u041c\u0424\u0422\u0418<\/div>\n
    \u041a\u0438\u0441\u0435\u043b\u0435\u0432\u0441\u043a\u0438\u0439 \u0412\u0441\u0435\u0432\u043e\u043b\u043e\u0434 \u0410\u043b\u0435\u043a\u0441\u0435\u0435\u0432\u0438\u0447, \u0438\u043d\u0436\u0435\u043d\u0435\u0440, \u0441\u0442\u0443\u0434\u0435\u043d\u0442 \u041c\u0413\u0423<\/div>\n
    \u0417\u0432\u043e\u043d\u043e\u0432 \u041f\u0435\u0442\u0440 \u041f\u0435\u0442\u0440\u043e\u0432\u0438\u0447, \u0438\u043d\u0436\u0435\u043d\u0435\u0440, \u0441\u0442\u0443\u0434\u0435\u043d\u0442 \u041c\u042d\u0418<\/div>\n
    \u0413\u043b\u0430\u0437 \u041e\u043b\u0435\u0433 \u0413\u0435\u043d\u043d\u0430\u0434\u044c\u0435\u0432\u0438\u0447, \u0441\u0442\u0443\u0434\u0435\u043d\u0442 \u041c\u042d\u0418<\/div>\n

    \u041f\u0443\u0431\u043b\u0438\u043a\u0430\u0446\u0438\u0438<\/b><\/strong><\/p>\n

      \n
    1. Sidorov F., Rogozhin A., Bruk M., Zhikharev E. Direct Monte-Carlo simulation of dry e-beam etching of resist \/\/ Microelectronic Engineering \u2013 2020 \u2013 V.227 \u2013 111313. DOI: 10.1016\/j.mee.2020.111313<\/li>\n
    2. Isaev A.G., Sidorov F.A., Rogozhin A.E. Influence of Resist Spreading during Its Dry Electron-Beam Etching on a Lateral Resolution \/\/ Russian Microelectronics \u2013 2021 \u2013 V.50(1) \u2013 p. 19\u201323. DOI: 10.1134\/S1063739721010066<\/li>\n
    3. Miakonkikh A., Lomov A., Rogozhin A., Rudenko K., Lukichev V., Kiselev D., Tikhonenlo F., Antonov V., Popov V. Phase transformation in ALD hafnia based layers for silicon-on-ferroelectric devices \/\/ 2020 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon, EUROSOI-ULIS \u2013 2020, art. no. 9365298. DOI: 10.1109\/EUROSOI-ULIS49407.2020.9365298<\/li>\n
    4. Miakonkikh A.V., Shishlyannikov A.V., Tatarintsev,A.A., Kuzmenko V.O., Rudenko K.V., Gornev E.S. Study of the Plasma Resistance of a High Resolution e-Beam Resist HSQ for Prototyping Nanoelectronic Devices \/\/ Russian Microelectronics \u2013 2021 \u2013 V.50(5) \u2013 p. 297-302. DOI: 10.1134\/S1063739721050048<\/li>\n
    5. Permyakova O.O., Rogozhin A.E. Modelling electroforming process under constant bias voltage conditions \/\/ J. Phys.: Conf. Ser. \u2013 2021 \u2013 V.2086 \u2013 012030. DOI: 10.1088\/1742-6596\/2086\/1\/012030<\/li>\n
    6. Rogozhin A., Miakonkikh A., Smirnova E., Lomov A., Simakin S. Rudenko K. Plasma Enhanced Atomic Layer Deposition of Ruthenium Films Using Ru(EtCp)2 Precursor \/\/ Coatings \u2013 2021 \u2013 V.11 \u2013 p.117. DOI: 10.3390\/coatings 11020117<\/li>\n
    7. Smirnova E.A., Miakonkikh A.V., Rogozhin A.E., Rudenko K.V. Properties of plasma enhanced atomic layer deposited ruthenium thin films from Ru(EtCp)2 \/\/ J. Phys.: Conf. Ser. \u2013 2021 \u2013 V.2086 \u2013 012209. DOI: 10.1088\/1742-6596\/2086\/1\/012209<\/li>\n
    8. V P Popov, V A Antonov, F V Tikhonenko, S M Tarkov, A K Gutakovskii, I E Tyschenko, A V Miakonkikh, A A Lomov, A E Rogozhin, K V Rudenko, Robust semiconductor-on-ferroelectric structures with hafnia\u2013zirconia\u2013alumina UTBOX stacks compatible with CMOS technology \/\/ J. Phys. D: Appl. Phys. \u2013 2021 \u2013 54 225101. DOI: 10.1088\/1361-6463\/abe6cb<\/li>\n
    9. Chesnokov Y.M., Miakonkikh A.V., Rogozhin A.E., Rudenko K.V., Vasiliev A.L. Microstructure and electrical properties of thin HfO2 deposited by plasma-enhanced atomic layer deposition \/\/ (2018) Journal of Materials Science, 53 (10), pp. 7214-7223. DOI: 10.1007\/s10853-018-2099-5<\/li>\n
    10. Miakonkikh A.V., Shishlyannikov A.V., Tatarintsev,A.A., Kuzmenko V.O., Rudenko K.V., Gornev E.S. Study of the Plasma Resistance of a High Resolution e-Beam Resist HSQ for Prototyping Nanoelectronic Devices \/\/ Russian Microelectronics \u2013 2021 \u2013 V.50(5) \u2013 p. 297-302. DOI: 10.1134\/S1063739721050048<\/li>\n
    11. Tatarintsev, A.A., Shishlyannikov, A.V., Rudenko, K.V. et al. The Effect of Temperature on the Development of a Contrast HSQ Electronic Resist. \/\/ Russ Microelectron 49, 151\u2013156 (2020). DOI: 10.1134\/S1063739720030063<\/li>\n
    12. \u041c\u044f\u043a\u043e\u043d\u044c\u043a\u0438\u0445 \u0410.\u0412., \u041e\u0440\u043b\u0438\u043a\u043e\u0432\u0441\u043a\u0438\u0439 \u041d.\u0410., \u0420\u043e\u0433\u043e\u0436\u0438\u043d \u0410.\u0415., \u0422\u0430\u0442\u0430\u0440\u0438\u043d\u0446\u0435\u0432 \u0410.\u0410., \u0420\u0443\u0434\u0435\u043d\u043a\u043e \u041a.\u0412., \u0412\u043b\u0438\u044f\u043d\u0438\u0435 \u0434\u043e\u0437\u044b \u044d\u043a\u0441\u043f\u043e\u043d\u0438\u0440\u043e\u0432\u0430\u043d\u0438\u044f \u043d\u0430 \u0441\u0442\u043e\u0439\u043a\u043e\u0441\u0442\u044c \u043d\u0435\u0433\u0430\u0442\u0438\u0432\u043d\u043e\u0433\u043e \u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u043d\u043e\u0433\u043e \u0440\u0435\u0437\u0438\u0441\u0442\u0430 HSQ \u0432 \u043f\u0440\u043e\u0446\u0435\u0441\u0441\u0430\u0445 \u043f\u043b\u0430\u0437\u043c\u043e\u0445\u0438\u043c\u0438\u0447\u0435\u0441\u043a\u043e\u0433\u043e \u0438 \u0445\u0438\u043c\u0438\u0447\u0435\u0441\u043a\u043e\u0433\u043e \u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u044f \/\/ \u041c\u0438\u043a\u0440\u043e\u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u0438\u043a\u0430, \u0422\u043e\u043c 47 (2018), \u0441. 179-186. DOI: 10.7868\/S0544126918030018<\/li>\n<\/ol>\n","protected":false},"excerpt":{"rendered":"

      \u0420\u0443\u043a\u043e\u0432\u043e\u0434\u0438\u0442\u0435\u043b\u044c \u043b\u0430\u0431\u043e\u0440\u0430\u0442\u043e\u0440\u0438\u0438 \u2014 \u0441.\u043d.\u0441., \u043a.\u0444-\u043c.\u043d. \u0420\u043e\u0433\u043e\u0436\u0438\u043d \u0410.\u0415. rogozhin@ftian.ru \u041e\u0441\u043d\u043e\u0432\u043d\u044b\u0435 \u043d\u0430\u043f\u0440\u0432\u043b\u0435\u043d\u0438\u044f \u0438\u0441\u0441\u043b\u0435\u0434\u043e\u0432\u0430\u043d\u0438\u044f \u0420\u0430\u0437\u0440\u0430\u0431\u043e\u0442\u043a\u0430 \u043d\u043e\u0432\u044b\u0445 \u0440\u0435\u0437\u0438\u0441\u0442\u043e\u0432 \u0438 \u0445\u0430\u0440\u0430\u043a\u0442\u0435\u0440\u0438\u0437\u0430\u0446\u0438\u044f \u0434\u043e\u0441\u0442\u0443\u043f\u043d\u044b\u0445 \u0440\u0435\u0437\u0438\u0441\u0442\u043e\u0432 \u0432 \u0438\u043d\u0442\u0435\u0440\u0435\u0441\u0430\u0445 \u043c\u0438\u043a\u0440\u043e\u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u043d\u043e\u0439 \u043f\u0440\u043e\u043c\u044b\u0448\u043b\u0435\u043d\u043d\u043e\u0441\u0442\u0438 \u0420\u0424 \u0421\u043e\u0437\u0434\u0430\u043d\u0438\u0435 \u0431\u0430\u0437\u044b\u041f\u043e\u0434\u0440\u043e\u0431\u043d\u0435\u0435<\/a><\/span><\/p>\n","protected":false},"author":3,"featured_media":0,"parent":565,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"ngg_post_thumbnail":0,"footnotes":""},"class_list":["entry","author-redactor1","post-3003","page","type-page","status-publish"],"yoast_head":"\n\u041b\u0430\u0431\u043e\u0440\u0430\u0442\u043e\u0440\u0438\u044f \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0439 \u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u043d\u043e\u0439 \u0438 \u043e\u043f\u0442\u0438\u0447\u0435\u0441\u043a\u043e\u0439 \u043b\u0438\u0442\u043e\u0433\u0440\u0430\u0444\u0438\u0438<\/title>\n<meta name=\"description\" content=\"\u041e\u0441\u043d\u043e\u0432\u043d\u044b\u0435 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