{"id":2960,"date":"2023-01-18T11:16:23","date_gmt":"2023-01-18T11:16:23","guid":{"rendered":"http:\/\/ftian.ru\/?page_id=2960"},"modified":"2024-02-07T10:58:44","modified_gmt":"2024-02-07T10:58:44","slug":"laboratorija-funkcionalnyh-dijelektrikov-dlja-mikrojelektroniki","status":"publish","type":"page","link":"https:\/\/ftian.ru\/en\/institut\/laboratorii\/laboratorija-funkcionalnyh-dijelektrikov-dlja-mikrojelektroniki\/","title":{"rendered":"Laboratory of functional dielectrics for microelectronics"},"content":{"rendered":"<p><a href=\"#a\"><strong>\u041e\u0441\u043d\u043e\u0432\u043d\u044b\u0435 \u043d\u0430\u043f\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u044f \u0438\u0441\u0441\u043b\u0435\u0434\u043e\u0432\u0430\u043d\u0438\u0439<\/strong><\/a><\/p>\n<p><a href=\"#b\"><strong>\u041e\u0441\u043d\u043e\u0432\u043d\u044b\u0435 \u043d\u0430\u0443\u0447\u043d\u044b\u0435 \u0440\u0435\u0437\u0443\u043b\u044c\u0442\u0430\u0442\u044b<\/strong><\/a><\/p>\n<p><strong><a href=\"#c\">\u041f\u0430\u0442\u0435\u043d\u0442\u044b<\/a><\/strong><\/p>\n<p><a href=\"#c\"><strong>\u0422\u0435\u043a\u0443\u0449\u0438\u0435 \u043f\u0440\u043e\u0435\u043a\u0442\u044b \u0438 \u0433\u0440\u0430\u043d\u0442\u044b<\/strong><\/a><\/p>\n<p><a href=\"#d\"><strong>\u041f\u0443\u0431\u043b\u0438\u043a\u0430\u0446\u0438\u0438 \u0437\u0430 2020\u20142021 \u0433\u0433.<\/strong><\/a><\/p>\n<p>&nbsp;<\/p>\n<p><a href=\"#a\"><strong><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-2998 alignleft\" src=\"http:\/\/ftian.ru\/wp-content\/uploads\/2023\/01\/Miakonkikh.jpg\" alt=\"Laboratory of functional dielectrics for microelectronics\" width=\"133\" height=\"174\" \/><\/strong><\/a>\u0420\u0443\u043a\u043e\u0432\u043e\u0434\u0438\u0442\u0435\u043b\u044c \u043b\u0430\u0431\u043e\u0440\u0430\u0442\u043e\u0440\u0438\u0438 \u2014 \u0441.\u043d.\u0441., \u043a.\u0444-\u043c.\u043d. \u041c\u044f\u043a\u043e\u043d\u044c\u043a\u0438\u0445 \u0410.\u0412.<\/p>\n<p>\u00a0+7(499)129-55-08<\/p>\n<p>miakonkikh@ftian.ru<\/p>\n<p><strong>\u00a0<\/strong><\/p>\n<p><strong>\u00a0<\/strong><\/p>\n<p><strong><b><a id=\"a\"><\/a>\u041e\u0441\u043d\u043e\u0432\u043d\u044b\u0435 \u043d\u0430\u043f\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u044f \u0438\u0441\u0441\u043b\u0435\u0434\u043e\u0432\u0430\u043d\u0438\u0439<\/b><\/strong><\/p>\n<ol>\n<li>\u0418\u0441\u0441\u043b\u0435\u0434\u043e\u0432\u0430\u043d\u0438\u0435 \u043f\u0440\u043e\u0446\u0435\u0441\u0441\u0430 \u043f\u043b\u0430\u0437\u043c\u043e\u0441\u0442\u0438\u043c\u0443\u043b\u0438\u0440\u043e\u0432\u0430\u043d\u043d\u043e\u0433\u043e \u0430\u0442\u043e\u043c\u043d\u043e-\u0441\u043b\u043e\u0435\u0432\u043e\u0433\u043e \u043e\u0441\u0430\u0436\u0434\u0435\u043d\u0438\u044f \u0434\u0438\u044d\u043b\u0435\u043a\u0442\u0440\u0438\u043a\u043e\u0432 \u0438 \u043c\u0435\u0442\u0430\u043b\u043b\u043e\u0432<\/li>\n<li>\u0418\u0441\u0441\u043b\u0435\u0434\u043e\u0432\u0430\u043d\u0438\u0435 \u043f\u043b\u0430\u0437\u043c\u0435\u043d\u043d\u043e\u0433\u043e \u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u044f \u043f\u043e\u043b\u0443\u043f\u0440\u043e\u0432\u043e\u0434\u043d\u0438\u043a\u043e\u0432 \u0438 \u0434\u0438\u044d\u043b\u0435\u043a\u0442\u0440\u0438\u043a\u043e\u0432<\/li>\n<li>\u0418\u0441\u0441\u043b\u0435\u0434\u043e\u0432\u0430\u043d\u0438\u044f \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0447\u0435\u0441\u043a\u0438\u0445 \u043f\u043e\u0434\u0445\u043e\u0434\u043e\u0432 \u043a \u0444\u043e\u0440\u043c\u0438\u0440\u043e\u0432\u0430\u043d\u0438\u044e \u0438\u043d\u0442\u0435\u0433\u0440\u0430\u043b\u044c\u043d\u044b\u0445 \u043f\u043b\u0430\u043d\u0430\u0440\u043d\u044b\u0445 \u0438 \u0442\u0440\u0435\u043d\u0447\u0435\u0432\u044b\u0445 \u043a\u043e\u043d\u0434\u0435\u043d\u0441\u0430\u0442\u043e\u0440\u043e\u0432 \u0432\u044b\u0441\u043e\u043a\u043e\u0439 \u0435\u043c\u043a\u043e\u0441\u0442\u0438<\/li>\n<\/ol>\n<p><strong><b>\u00a0<\/b><\/strong><\/p>\n<p><strong><b><a id=\"b\"><\/a>\u041e\u0441\u043d\u043e\u0432\u043d\u044b\u0435 \u043d\u0430\u0443\u0447\u043d\u044b\u0435 \u0440\u0435\u0437\u0443\u043b\u044c\u0442\u0430\u0442\u044b<\/b><\/strong><\/p>\n<ol>\n<li>\u0418\u0441\u0441\u043b\u0435\u0434\u043e\u0432\u0430\u043d\u044b \u0432\u043e\u0437\u043c\u043e\u0436\u043d\u043e\u0441\u0442\u0438 \u0432\u044b\u043f\u043e\u043b\u043d\u0435\u043d\u0438\u044f \u0430\u0442\u043e\u043c\u043d\u043e-\u0441\u043b\u043e\u0435\u0432\u043e\u0435 \u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u044f \u0434\u0438\u044d\u043b\u0435\u043a\u0442\u0440\u0438\u043a\u043e\u0432 \u0441 \u0432\u044b\u0441\u043e\u043a\u043e\u0439 \u0434\u0438\u044d\u043b\u0435\u043a\u0442\u0440\u0438\u0447\u0435\u0441\u043a\u043e\u0439 \u043f\u0440\u043e\u043d\u0438\u0446\u0430\u0435\u043c\u043e\u0441\u0442\u044c\u044e \u0432 ICP \u0443\u0441\u0442\u0430\u043d\u043e\u0432\u043a\u0435 \u043f\u043b\u0430\u0437\u043c\u0435\u043d\u043d\u043e\u0433\u043e \u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u044f<\/li>\n<li>\u041f\u0440\u0435\u0434\u043b\u043e\u0436\u0435\u043d \u0441\u043f\u043e\u0441\u043e\u0431 \u0446\u0438\u043a\u043b\u0438\u0447\u0435\u0441\u043a\u043e\u0433\u043e \u0430\u043d\u0438\u0437\u043e\u0442\u0440\u043e\u043f\u043d\u043e\u0433\u043e \u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u044f \u0433\u043b\u0443\u0431\u043e\u043a\u0438\u0445 \u0442\u0440\u0435\u043d\u0447\u0435\u0439 \u0432 \u043a\u0440\u0435\u043c\u043d\u0438\u0438 \u0432 \u0446\u0438\u043a\u043b\u0435 \u00ab\u043d\u0438\u0442\u0440\u0438\u0434\u0438\u0437\u0430\u0446\u0438\u044f-\u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u0435\u00bb<\/li>\n<li>\u0418\u0441\u0441\u043b\u0435\u0434\u043e\u0432\u0430\u043d\u044b \u0432\u043e\u0437\u043c\u043e\u0436\u043d\u043e\u0441\u0442\u0438 \u043a\u043e\u043d\u0444\u043e\u0440\u043c\u043d\u043e\u0433\u043e \u043e\u0441\u0430\u0436\u0434\u0435\u043d\u0438\u044f \u0434\u0438\u044d\u043b\u0435\u043a\u0442\u0440\u0438\u043a\u043e\u0432 \u0438 \u043c\u0435\u0442\u0430\u043b\u043b\u043e\u0432 \u0432 \u0442\u0440\u0435\u043d\u0447\u0435\u0432\u044b\u0435 \u0432\u044b\u0441\u043e\u043a\u043e\u0430\u0441\u043f\u0435\u043a\u0442\u043d\u044b\u0435 \u0441\u0442\u0440\u0443\u043a\u0442\u0443\u0440\u044b<\/li>\n<\/ol>\n<p><strong><b>\u00a0<\/b><\/strong><\/p>\n<p><strong><b><a id=\"c\"><\/a>\u041f\u0430\u0442\u0435\u043d\u0442\u044b<\/b><\/strong><\/p>\n<ol>\n<li>\u0417\u0430\u044f\u0432\u043a\u0430: 2022129841, \u043e\u0442 17.11.2022. \u0421\u043f\u043e\u0441\u043e\u0431 \u0430\u043d\u0438\u0437\u043e\u0442\u0440\u043e\u043f\u043d\u043e\u0433\u043e \u043f\u043b\u0430\u0437\u043c\u0435\u043d\u043d\u043e\u0433\u043e \u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u044f \u043a\u0440\u0435\u043c\u043d\u0438\u0435\u0432\u044b\u0445 \u043c\u0438\u043a\u0440\u043e\u0441\u0442\u0440\u0443\u043a\u0442\u0443\u0440 \u0432 \u0446\u0438\u043a\u043b\u0438\u0447\u0435\u0441\u043a\u043e\u043c \u043f\u0440\u043e\u0446\u0435\u0441\u0441\u0435 \u043d\u0438\u0442\u0440\u0438\u0434\u0438\u0437\u0430\u0446\u0438\u044f-\u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u0435.<\/li>\n<\/ol>\n<p><strong><b>\u00a0<\/b><\/strong><\/p>\n<p><strong><b><a id=\"d\"><\/a>\u0422\u0435\u043a\u0443\u0449\u0438\u0435 \u043f\u0440\u043e\u0435\u043a\u0442\u044b \u0438 \u0433\u0440\u0430\u043d\u0442\u044b<\/b><\/strong><\/p>\n<ol>\n<li>\u0413\u043e\u0441. \u0417\u0430\u0434\u0430\u043d\u0438\u0435 #FFNN-2022-0020 \u201c\u0424\u0443\u043d\u0434\u0430\u043c\u0435\u043d\u0442\u0430\u043b\u044c\u043d\u044b\u0435 \u0438 \u043f\u0440\u0438\u043a\u043b\u0430\u0434\u043d\u044b\u0435 \u0438\u0441\u0441\u043b\u0435\u0434\u043e\u0432\u0430\u043d\u0438\u044f \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0439 \u0444\u043e\u0440\u043c\u0438\u0440\u043e\u0432\u0430\u043d\u0438\u044f \u0444\u0443\u043d\u043a\u0446\u0438\u043e\u043d\u0430\u043b\u044c\u043d\u044b\u0445 \u0434\u0438\u044d\u043b\u0435\u043a\u0442\u0440\u0438\u043a\u043e\u0432 \u0432 \u043c\u0438\u043a\u0440\u043e\u0441\u0442\u0440\u0443\u043a\u0442\u0443\u0440\u0430\u0445 \u0438\u043d\u0442\u0435\u0433\u0440\u0430\u043b\u044c\u043d\u044b\u0445 \u0441\u0445\u0435\u043c\u201d2022-2024 \u0433\u043e\u0434\u044b<\/li>\n<li>\u0418\u0441\u0441\u043b\u0435\u0434\u043e\u0432\u0430\u043d\u0438\u0435 \u0432\u043e\u0437\u043c\u043e\u0436\u043d\u043e\u0441\u0442\u0435\u0439 \u0430\u0442\u043e\u043c\u043d\u043e-\u0441\u043b\u043e\u0435\u0432\u043e\u0433\u043e \u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u044f \u0441\u0442\u0440\u0443\u043a\u0442\u0443\u0440 \u043c\u0438\u043a\u0440\u043e- \u0438 \u043d\u0430\u043d\u043e\u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u0438\u043a\u0438 (\u0420\u0424\u0424\u0418)<\/li>\n<li>\u0418\u0441\u0441\u043b\u0435\u0434\u043e\u0432\u0430\u043d\u0438\u0435 \u0432\u043e\u0437\u043c\u043e\u0436\u043d\u043e\u0441\u0442\u0435\u0439 \u043a\u0440\u0438\u043e\u0433\u0435\u043d\u043d\u043e\u0433\u043e \u0430\u0442\u043e\u043c\u043d\u043e-\u0441\u043b\u043e\u0435\u0432\u043e\u0433\u043e \u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u044f \u043f\u043e\u0440\u0438\u0441\u0442\u044b\u0445 \u0434\u0438\u044d\u043b\u0435\u043a\u0442\u0440\u0438\u043a\u043e\u0432 \u0441 \u0443\u043b\u044c\u0442\u0440\u0430\u043d\u0438\u0437\u043a\u043e\u0439 \u0434\u0438\u044d\u043b\u0435\u043a\u0442\u0440\u0438\u0447\u0435\u0441\u043a\u043e\u0439 \u043f\u0440\u043e\u043d\u0438\u0446\u0430\u0435\u043c\u043e\u0441\u0442\u044c\u044e (\u0420\u041d\u0424)<\/li>\n<\/ol>\n<p><strong><b>\u00a0<\/b><\/strong><\/p>\n<p><strong><b><a id=\"e\"><\/a>\u041f\u0443\u0431\u043b\u0438\u043a\u0430\u0446\u0438\u0438\u00a0<\/b><\/strong><\/p>\n<ol>\n<li>V. Kuzmenko, Y. Lebedinskij, A. Miakonkikh, K. Rudenko\/\/Selective atomic layer etching of Al2O3, AlNx and HfO2 in conventional ICP etching tool \/\/ Vacuum 207 (2023) 111585 doi.org\/10.1016\/j.vacuum.2022.111585<\/li>\n<li>M. Tarkov, F. Tikhonenko, V. Popov, V. Antonov, A. Miakonkikh and K. Rudenko \/\/ Ferroelectric Devices for Content-Addressable Memory \/\/ Nanomaterials 2022, 12, 4488 https:\/\/doi.org\/10.3390\/nano12244488<\/li>\n<\/ol>\n","protected":false},"excerpt":{"rendered":"<p>\u041e\u0441\u043d\u043e\u0432\u043d\u044b\u0435 \u043d\u0430\u043f\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u044f \u0438\u0441\u0441\u043b\u0435\u0434\u043e\u0432\u0430\u043d\u0438\u0439 \u041e\u0441\u043d\u043e\u0432\u043d\u044b\u0435 \u043d\u0430\u0443\u0447\u043d\u044b\u0435 \u0440\u0435\u0437\u0443\u043b\u044c\u0442\u0430\u0442\u044b \u041f\u0430\u0442\u0435\u043d\u0442\u044b \u0422\u0435\u043a\u0443\u0449\u0438\u0435 \u043f\u0440\u043e\u0435\u043a\u0442\u044b \u0438 \u0433\u0440\u0430\u043d\u0442\u044b \u041f\u0443\u0431\u043b\u0438\u043a\u0430\u0446\u0438\u0438 \u0437\u0430 2020\u20142021 \u0433\u0433. &nbsp; \u0420\u0443\u043a\u043e\u0432\u043e\u0434\u0438\u0442\u0435\u043b\u044c \u043b\u0430\u0431\u043e\u0440\u0430\u0442\u043e\u0440\u0438\u0438 \u2014 \u0441.\u043d.\u0441., \u043a.\u0444-\u043c.\u043d. \u041c\u044f\u043a\u043e\u043d\u044c\u043a\u0438\u0445 \u0410.\u0412. \u00a0+7(499)129-55-08 miakonkikh@ftian.ru<span class=\"more-link\"><a href=\"https:\/\/ftian.ru\/en\/institut\/laboratorii\/laboratorija-funkcionalnyh-dijelektrikov-dlja-mikrojelektroniki\/\">\u041f\u043e\u0434\u0440\u043e\u0431\u043d\u0435\u0435<\/a><\/span><\/p>\n","protected":false},"author":3,"featured_media":0,"parent":565,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"ngg_post_thumbnail":0,"footnotes":""},"class_list":["entry","author-redactor1","post-2960","page","type-page","status-publish"],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.9 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>Laboratory of functional dielectrics for microelectronics<\/title>\n<meta name=\"description\" content=\"\u0420\u0443\u043a\u043e\u0432\u043e\u0434\u0438\u0442\u0435\u043b\u044c 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