{"id":1035,"date":"2021-12-11T13:59:45","date_gmt":"2021-12-11T13:59:45","guid":{"rendered":"https:\/\/normoprot.h1n.ru\/?page_id=1035"},"modified":"2022-03-04T21:22:08","modified_gmt":"2022-03-04T21:22:08","slug":"tehnologicheskoe-oborudovanie-dlja-sozdanija-mikro-i-nanojelektronnyh-struktur","status":"publish","type":"page","link":"https:\/\/ftian.ru\/en\/institut\/oborudovanie\/tehnologicheskoe-oborudovanie-dlja-sozdanija-mikro-i-nanojelektronnyh-struktur\/","title":{"rendered":"\u0422\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0447\u0435\u0441\u043a\u043e\u0435 \u043e\u0431\u043e\u0440\u0443\u0434\u043e\u0432\u0430\u043d\u0438\u0435 \u0434\u043b\u044f \u0441\u043e\u0437\u0434\u0430\u043d\u0438\u044f \u043c\u0438\u043a\u0440\u043e- \u0438 \u043d\u0430\u043d\u043e\u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u043d\u044b\u0445 \u0441\u0442\u0440\u0443\u043a\u0442\u0443\u0440"},"content":{"rendered":"<div id='gallery-1' class='gallery galleryid-1035 gallery-columns-2 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srcset=\"https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/tehnologscheskoe_oborydovanie_mikro_nano85451223512.jpg 632w, https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/tehnologscheskoe_oborydovanie_mikro_nano85451223512-300x201.jpg 300w, https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/tehnologscheskoe_oborydovanie_mikro_nano85451223512-465x312.jpg 465w\" sizes=\"auto, (max-width: 632px) 100vw, 632px\" title=\"\u0422\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0447\u0435\u0441\u043a\u043e\u0435 \u043e\u0431\u043e\u0440\u0443\u0434\u043e\u0432\u0430\u043d\u0438\u0435 \u0434\u043b\u044f \u0441\u043e\u0437\u0434\u0430\u043d\u0438\u044f \u043c\u0438\u043a\u0440\u043e- \u0438 \u043d\u0430\u043d\u043e\u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u043d\u044b\u0445 \u0441\u0442\u0440\u0443\u043a\u0442\u0443\u0440\" \/><\/a>\r\n\t\t\t<\/div>\r\n\t\t\t\t<figcaption class='wp-caption-text gallery-caption' id='gallery-1-1038'>\r\n\t\t\t\t\u0423\u0441\u0442\u0430\u043d\u043e\u0432\u043a\u0430 \u043f\u043b\u0430\u0437\u043c\u043e\u0441\u0442\u0438\u043c\u0443\u043b\u0438\u0440\u043e\u0432\u0430\u043d\u043d\u043e\u0433\u043e \u0430\u0442\u043e\u043c\u043d\u043e-\u0441\u043b\u043e\u0435\u0432\u043e\u0433\u043e \u043e\u0441\u0430\u0436\u0434\u0435\u043d\u0438\u044f \u0442\u043e\u043d\u043a\u0438\u0445 \u043f\u043b\u0435\u043d\u043e\u043a (PEALD) FlexAl (Oxford Instruments, UK) \u0434\u043b\u044f \u0440\u043e\u0441\u0442\u0430 \u043f\u043e\u0434\u0437\u0430\u0442\u0432\u043e\u0440\u043d\u044b\u0445 High-K \u0434\u0438\u044d\u043b\u0435\u043a\u0442\u0440\u0438\u043a\u043e\u0432, \u043c\u0430\u0442\u0435\u0440\u0438\u0430\u043b\u043e\u0432 \u043c\u0435\u0442\u0430\u043b\u043b\u0438\u0447\u0435\u0441\u043a\u0438\u0445 \u0437\u0430\u0442\u0432\u043e\u0440\u043e\u0432, \u0431\u0430\u0440\u044c\u0435\u0440\u043d\u044b\u0445 \u0438 \u043a\u0430\u0442\u0430\u043b\u0438\u0442\u0438\u0447\u0435\u0441\u043a\u0438\u0445 \u0441\u043b\u043e\u0435\u0432. \u0412\u043e\u0437\u043c\u043e\u0436\u043d\u0430 \u043e\u0431\u0440\u0430\u0431\u043e\u0442\u043a\u0430 \u043f\u043b\u0430\u0441\u0442\u0438\u043d 50 &#8211; 200 \u043c\u043c.\r\n\t\t\t\t<\/figcaption><\/figure><figure class='gallery-item'>\r\n\t\t\t<div class='gallery-icon landscape'>\r\n\t\t\t\t<a href='https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/tehnologscheskoe_oborydovanie_mikro_nano15343512.jpg'><img loading=\"lazy\" decoding=\"async\" width=\"660\" height=\"442\" src=\"https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/tehnologscheskoe_oborydovanie_mikro_nano15343512.jpg\" class=\"attachment-full size-full\" alt=\"\u0422\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0447\u0435\u0441\u043a\u043e\u0435 \u043e\u0431\u043e\u0440\u0443\u0434\u043e\u0432\u0430\u043d\u0438\u0435 \u0434\u043b\u044f \u0441\u043e\u0437\u0434\u0430\u043d\u0438\u044f \u043c\u0438\u043a\u0440\u043e- \u0438 \u043d\u0430\u043d\u043e\u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u043d\u044b\u0445 \u0441\u0442\u0440\u0443\u043a\u0442\u0443\u0440\" aria-describedby=\"gallery-1-1036\" srcset=\"https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/tehnologscheskoe_oborydovanie_mikro_nano15343512.jpg 660w, https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/tehnologscheskoe_oborydovanie_mikro_nano15343512-300x201.jpg 300w, https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/tehnologscheskoe_oborydovanie_mikro_nano15343512-465x311.jpg 465w\" sizes=\"auto, (max-width: 660px) 100vw, 660px\" title=\"\u0422\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0447\u0435\u0441\u043a\u043e\u0435 \u043e\u0431\u043e\u0440\u0443\u0434\u043e\u0432\u0430\u043d\u0438\u0435 \u0434\u043b\u044f \u0441\u043e\u0437\u0434\u0430\u043d\u0438\u044f \u043c\u0438\u043a\u0440\u043e- \u0438 \u043d\u0430\u043d\u043e\u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u043d\u044b\u0445 \u0441\u0442\u0440\u0443\u043a\u0442\u0443\u0440\" \/><\/a>\r\n\t\t\t<\/div>\r\n\t\t\t\t<figcaption class='wp-caption-text gallery-caption' id='gallery-1-1036'>\r\n\t\t\t\t\u0414\u0432\u0443\u0445\u043a\u0430\u043c\u0435\u0440\u043d\u044b\u0439 \u043a\u043b\u0430\u0441\u0442\u0435\u0440 Dual Plasmalab 100 ICP 380 System (Oxford Instruments, UK) \u0434\u043b\u044f \u043f\u043b\u0430\u0437\u043c\u043e\u0445\u0438\u043c\u0438\u0447\u0435\u0441\u043a\u043e\u0433\u043e \u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u044f \u043c\u0438\u043a\u0440\u043e- \u0438 \u043d\u0430\u043d\u043e\u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u043d\u044b\u0445 \u0441\u0442\u0440\u0443\u043a\u0442\u0443\u0440 \u0432\u043e \u0444\u0442\u043e\u0440- \u0438 \u0445\u043b\u043e\u0440\u0441\u043e\u0434\u0435\u0440\u0436\u0430\u0449\u0435\u0439 HDP \u043f\u043b\u0430\u0437\u043c\u0435 \u043d\u0438\u0437\u043a\u043e\u0433\u043e \u0434\u0430\u0432\u043b\u0435\u043d\u0438\u044f. \u0412\u043e\u0437\u043c\u043e\u0436\u043d\u0430 \u043e\u0431\u0440\u0430\u0431\u043e\u0442\u043a\u0430 \u043f\u043b\u0430\u0441\u0442\u0438\u043d 100, 150, 200 \u043c\u043c.\r\n\t\t\t\t<\/figcaption><\/figure><\/div>\n\n<div id='gallery-2' class='gallery galleryid-1035 gallery-columns-2 gallery-size-full'><figure class='gallery-item'>\r\n\t\t\t<div class='gallery-icon landscape'>\r\n\t\t\t\t<a href='https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/oborud9656652613.png'><img loading=\"lazy\" decoding=\"async\" width=\"536\" height=\"512\" src=\"https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/oborud9656652613.png\" class=\"attachment-full size-full\" alt=\"\u0421\u043e\u0432\u0440\u0435\u043c\u0435\u043d\u043d\u043e\u0435 \u0430\u043d\u0430\u043b\u0438\u0442\u0438\u0447\u0435\u0441\u043a\u043e\u0435 \u043e\u0431\u043e\u0440\u0443\u0434\u043e\u0432\u0430\u043d\u0438\u0435 \u0424\u0422\u0418\u0410\u041d \u0438\u043c. \u041a.\u0410. \u0412\u0430\u043b\u0438\u0435\u0432\u0430 \u0420\u0410\u041d\" aria-describedby=\"gallery-2-1868\" srcset=\"https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/oborud9656652613.png 536w, https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/oborud9656652613-300x287.png 300w, https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/oborud9656652613-465x444.png 465w, https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/oborud9656652613-523x500.png 523w\" sizes=\"auto, (max-width: 536px) 100vw, 536px\" title=\"\u0421\u043e\u0432\u0440\u0435\u043c\u0435\u043d\u043d\u043e\u0435 \u0430\u043d\u0430\u043b\u0438\u0442\u0438\u0447\u0435\u0441\u043a\u043e\u0435 \u043e\u0431\u043e\u0440\u0443\u0434\u043e\u0432\u0430\u043d\u0438\u0435 \u0424\u0422\u0418\u0410\u041d \u0438\u043c. \u041a.\u0410. \u0412\u0430\u043b\u0438\u0435\u0432\u0430 \u0420\u0410\u041d\" \/><\/a>\r\n\t\t\t<\/div>\r\n\t\t\t\t<figcaption class='wp-caption-text gallery-caption' id='gallery-2-1868'>\r\n\t\t\t\t\u0412\u0430\u043a\u0443\u0443\u043c\u043d\u0430\u044f \u0443\u0441\u0442\u0430\u043d\u043e\u0432\u043a\u0430 &#8220;\u041a\u0430\u0448\u0442\u0430\u043d&#8221; \u0434\u043b\u044f \u0438\u043e\u043d\u043d\u043e-\u043b\u0443\u0447\u0435\u0432\u043e\u0433\u043e \u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u044f \u0438 \u043d\u0430\u043d\u0435\u0441\u0435\u043d\u0438\u044f \u0442\u043e\u043d\u043a\u0438\u0445 \u043f\u043b\u0435\u043d\u043e\u043a\r\n\t\t\t\t<\/figcaption><\/figure><figure class='gallery-item'>\r\n\t\t\t<div class='gallery-icon landscape'>\r\n\t\t\t\t<a href='https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/tehnologscheskoe_oborydovanie_mikro_nano69541312.jpg'><img loading=\"lazy\" decoding=\"async\" width=\"715\" height=\"479\" src=\"https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/tehnologscheskoe_oborydovanie_mikro_nano69541312.jpg\" class=\"attachment-full size-full\" alt=\"\u0422\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0447\u0435\u0441\u043a\u043e\u0435 \u043e\u0431\u043e\u0440\u0443\u0434\u043e\u0432\u0430\u043d\u0438\u0435 \u0434\u043b\u044f \u0441\u043e\u0437\u0434\u0430\u043d\u0438\u044f \u043c\u0438\u043a\u0440\u043e- \u0438 \u043d\u0430\u043d\u043e\u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u043d\u044b\u0445 \u0441\u0442\u0440\u0443\u043a\u0442\u0443\u0440\" aria-describedby=\"gallery-2-1037\" srcset=\"https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/tehnologscheskoe_oborydovanie_mikro_nano69541312.jpg 715w, https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/tehnologscheskoe_oborydovanie_mikro_nano69541312-300x201.jpg 300w, https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/tehnologscheskoe_oborydovanie_mikro_nano69541312-465x312.jpg 465w, https:\/\/ftian.ru\/wp-content\/uploads\/2021\/12\/tehnologscheskoe_oborydovanie_mikro_nano69541312-695x466.jpg 695w\" sizes=\"auto, (max-width: 715px) 100vw, 715px\" title=\"\u0422\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0447\u0435\u0441\u043a\u043e\u0435 \u043e\u0431\u043e\u0440\u0443\u0434\u043e\u0432\u0430\u043d\u0438\u0435 \u0434\u043b\u044f \u0441\u043e\u0437\u0434\u0430\u043d\u0438\u044f \u043c\u0438\u043a\u0440\u043e- \u0438 \u043d\u0430\u043d\u043e\u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u043d\u044b\u0445 \u0441\u0442\u0440\u0443\u043a\u0442\u0443\u0440\" \/><\/a>\r\n\t\t\t<\/div>\r\n\t\t\t\t<figcaption class='wp-caption-text gallery-caption' id='gallery-2-1037'>\r\n\t\t\t\t\u0423\u0441\u0442\u0430\u043d\u043e\u0432\u043a\u0430 \u0431\u044b\u0441\u0442\u0440\u043e\u0433\u043e \u0442\u0435\u0440\u043c\u0438\u0447\u0435\u0441\u043a\u043e\u0433\u043e (\u0444\u043e\u0442\u043e\u043d\u043d\u043e\u0433\u043e) \u043e\u0442\u0436\u0438\u0433\u0430 \u0438 \u0442\u0435\u0440\u043c\u0438\u0447\u0435\u0441\u043a\u043e\u0433\u043e \u043e\u043a\u0438\u0441\u043b\u0435\u043d\u0438\u044f (\u0411\u0422\u041e) As-One 100 (AnnealSys, France) \u0434\u043b\u044f \u0442\u0435\u0440\u043c\u043e\u043e\u0431\u0440\u0430\u0431\u043e\u0442\u043e\u043a \u043c\u0438\u043a\u0440\u043e\u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u043d\u044b\u0445 \u0441\u0442\u0440\u0443\u043a\u0442\u0443\u0440, \u043e\u0442\u0436\u0438\u0433\u0430 \u0443\u043b\u044c\u0442\u0440\u0430\u043c\u0435\u043b\u043a\u0438\u0445 \u0438\u043c\u043f\u043b\u0430\u043d\u0442\u0438\u0440\u043e\u0432\u0430\u043d\u043d\u044b\u0445 \u0441\u043b\u043e\u0435\u0432 \u0432 \u043a\u0440\u0435\u043c\u043d\u0438\u0438. \u0412\u043e\u0437\u043c\u043e\u0436\u043d\u0430 \u043e\u0431\u0440\u0430\u0431\u043e\u0442\u043a\u0430 \u043f\u043b\u0430\u0441\u0442\u0438\u043d 100 \u043c\u043c\r\n\t\t\t\t<\/figcaption><\/figure><\/div>\n\n","protected":false},"excerpt":{"rendered":"<p><span class=\"more-link\"><a 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